分析了准分子激光器放电腔内放电冲击波能量来源的计算方法,利用Fluent软件对放电冲击波物理过程进行了二维仿真,揭示了300 μs内横向冲击波和纵向冲击波的演化过程,获得了此过程中气体速度、密度、压力和温度等关键参数的变化规律。对仿真结果进行分析,得出了高重复频率放电腔设计中应注意的关键位置以及处理方法,提出了选取放电腔尺寸和边界等参数时的参考依据。

The calculation method of shock wave energy source in discharge chamber of excimer laser was analyzed. Two-dimensional simulation of the physical process of discharge shock wave was carried out by Fluent software. The evolution process of transverse and longitudinal shock waves in 300 μs was revealed. In this process, the distributions of gas velocity, density, pressure, and temperature are obtained. Based on the analysis of the simulation results, the key points in the design of high repetition rate discharge chamber and the processing methods are given. The reference basis for choosing parameters such as the size and boundary of discharge chamber is put forward.