Photonics Research, 2020, 8 (8): 08001381, Published Online: Jul. 31, 2020   

Electrical properties and microstructure formation of V/Al-based n-contacts on high Al mole fraction n-AlGaN layers Download: 875次

Author Affiliations
1 Institut für Festkörperphysik, Technische Universität Berlin, 10623 Berlin, Germany
2 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, 12489 Berlin, Germany
3 Institut für Physik, Humboldt Universität zu Berlin, 12489 Berlin, Germany
Abstract
The electrical and structural properties of V/Al-based n-contacts on nAlxGa1?xN with an Al mole fraction x ranging from x=0.75 to x=0.95 are investigated. Ohmic n-contacts are obtained up to x=0.75 with a contact resistivity of 5.7×10?4 Ω·cm2 whereas for higher Al mole fraction the IV characteristics are rectifying. Transmission electron microscopy reveals a thin crystalline AlN layer formed at the metal/semiconductor interface upon thermal annealing. Compositional analysis confirmed an Al enrichment at the interface. The interfacial nitride-based layer in n-contacts on nAl0.9Ga0.1N is partly amorphous and heavily contaminated by oxygen. The role and resulting limitations of Al in the metal stack for n-contacts on n-AlGaN with very high Al mole fraction are discussed. Finally, ultraviolet C (UVC) LEDs grown on nAl0.87Ga0.13N and emitting at 232 nm are fabricated with an operating voltage of 7.3 V and an emission power of 120 μW at 20 mA in cw operation.

Luca Sulmoni, Frank Mehnke, Anna Mogilatenko, Martin Guttmann, Tim Wernicke, Michael Kneissl. Electrical properties and microstructure formation of V/Al-based n-contacts on high Al mole fraction n-AlGaN layers[J]. Photonics Research, 2020, 8(8): 08001381.

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