以矢量波像差理论中的三级像差理论为基础,提出了一种两反系统装配失调量解算方法。该方法仅采用轴上视场波前像差系数建立失调量解算模型,然后基于球差系数解算间隔误差,并基于彗差和像散系数解算偏心和倾斜误差,大幅提高了解算精度和效率。以某一两反光学系统为例,利用光学设计软件Zemax进行模拟装调,系统轴上视场失调像差系数均减小到10 ^-7数量级,失调误差均校正到10 ^-5数量级,达到了良好的装调效果。最后,利用该失调量解算模型指导两反光学系统的装调,失调量解算精度及装调精度达到了使用要求。Zemax模拟装调结果和实际装调效果均证明了所提方法的正确性。

This study proposes a method to solve the assembly misalignment of two-reverse systems based on the three-level aberration theory in vector wave aberration theory. The proposed method uses the wavefront aberration coefficient of the axial field of view to establish a model for the misalignment solution. Then, the interval error is solved based on the spherical aberration coefficient. The eccentricity and inclination error are solved based on the coma error and astigmatism coefficient, which considerably improves the accuracy and efficiency of the solution. Using a two-reverse optical system as an example, the alignment is simulated based on the Zemax optical design software, the disorder aberration coefficient of axial field of view is reduced to 10 7 orders of magnitude, the misadjustment error correction is reduced to 10 5 orders of magnitude, and good alignment effect is achieved. The model is used to guide the alignment of a two-reverse system,so that the calculating precision and the alignment accuracy meet the requirements. The Zemax simulation and practical results demonstrate that the proposed method functions correctly.