激光与光电子学进展, 2020, 57 (11): 111431, 网络出版: 2020-06-02
基于空间光调制器的超快激光加工原理及应用 下载: 2652次特邀综述
Principles and Applications of Ultrafast Laser Processing Based on Spatial Light Modulators
摘要
近年来,空间光调制器被广泛应用到超快激光加工像差校正、多焦点平行加工、二维面加工、三维体加工、脉冲时空整形、结构光加工等不同领域。对空间光调制器的原理进行了介绍,阐述了空间光调制器的全息图生成算法,并着重介绍了空间光调制器在超快激光加工领域中的应用。
Abstract
In recent years, spatial light modulators have been widely applied to aberration compensation in ultrafast laser processing, multi-focus parallel machining, two-dimensional surface machining, three-dimensional bulk machining, pulse temporal and spatial shaping, and structured light machining. Here the working principle of spatial light modulators is introduced. Hologram generation algorithms of spatial light modulators are explained. The applications of spatial light modulators to the ultrafast laser processing field are elaborated.
刘思垣, 张静宇. 基于空间光调制器的超快激光加工原理及应用[J]. 激光与光电子学进展, 2020, 57(11): 111431. Siyuan Liu, Jingyu Zhang. Principles and Applications of Ultrafast Laser Processing Based on Spatial Light Modulators[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111431.