激光与光电子学进展, 2020, 57 (11): 111422, 网络出版: 2020-06-02
超短脉冲激光焊接非金属材料研究进展 下载: 1631次特邀综述
Research Progress on Ultrashort Pulsed Laser Welding of Non-Metallic Materials
激光光学 超短脉冲激光 焊接 陶瓷 玻璃 聚合物 单晶 laser optics ultrashort pulsed laser welding ceramics glass polymer monocrystal
摘要
近年来,随着研究人员在微纳集成领域(如微流体、微机械、微电子等领域)研究的逐渐深入,不同材料间的连接成为该领域发展的一个瓶颈。超短脉冲激光焊接技术因其热效应精密可控、精度高等优势,逐渐成为了非金属材料焊接领域的研究热点。以玻璃、陶瓷、半导体单晶材料、有机聚合物为例,介绍了超短脉冲激光在非金属材料焊接领域的应用及具体案例,并展望了该技术的未来发展趋势。
Abstract
In recent years, with the gradual deepening of researches on the field of micro-nano integration such as microfluidics, micromachines, and microelectronics, joining among different kinds of materials has become a bottleneck in the related fields. Due to the characteristics of controllable thermal effect and high precision, ultrashort pulsed laser welding has become a hotspot in the welding of non-metallic materials. In this review article, applications and concrete cases of the welding of non-metallic materials such as glasses, ceramics, semiconductor monocrystalline materials, and organic polymers are introduced. In addition, the future trends of ultrashort pulsed laser welding are also prospected.
孙轲, 孙盛芝, 邱建荣. 超短脉冲激光焊接非金属材料研究进展[J]. 激光与光电子学进展, 2020, 57(11): 111422. Ke Sun, Shengzhi Sun, Jianrong Qiu. Research Progress on Ultrashort Pulsed Laser Welding of Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111422.