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基于柔性材料的亚波长金属光栅偏振器的关键技术研究

Sub-Wavelength Metal-Grating Polarizer Fabricated on a Flexible Substrate

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摘要

亚波长周期结构光栅具有传统光栅所不具有的特殊特性,因此利用纳米压印技术在方形的PC(Polycarbonate,聚碳酸酯)上制作了一种亚波长金属纳米光栅偏振器,其周期为278 nm,深度为110 nm,占空比为0.5,沉积的金属铝层为70 nm。然后采用光谱测试系统对制作的亚波长金属光栅偏振器进行了简单的性能测试。实验结果表明:当入射光波长在600 nm时,制作的亚波长金属光栅偏振器具有较好的偏振特性,其TM偏振光透射效率高达55%,且消光比高达32 dB。另外,利用实验室前期制作的6通道传感器对制作的偏振器性能进行了测试,测试结果显示制作的偏振器的平均误差为0.2002°,最大误差为1.105°,标准误差为0.7255°。该制作工艺只涉及纳米压印工艺和金属蒸镀工艺两个工艺步骤,制作过程不涉及压印胶的涂覆、剥离和刻蚀工艺,因此在低成本、批量化制作大面积的偏振器方面具有很明显的优势,可普遍用于光探测器件、光电开光等半导体光电子器件的制作。

Abstract

A sub-wavelength periodic grating has special characteristics that a traditional grating does not have. We, therefore, fabricated a sub-wavelength, metal, nanograting polarizer on a square of polycarbonate (PC) using nano-imprinting technology. The grating period is 278 nm, depth is 110 nm, duty cycle is 0.5, and deposited aluminum-metal layer is 70 nm thick. The performance of the sub-wavelength metal grating polarizer was tested using a spectroscopic test system. The experimental results show that when the incident wavelength is 600 nm, a double-layer flexible grating polarizer acquires good polarization characteristics. Its transmission efficiency for TM-polarized light is as high as 55%, and the extinction ratio is as high as 32 dB. The performance of the polarizer was tested using a six-channel sensor made in the laboratory. The test results show that the average error of the polarizer is 0.2002°, maximum error is 1.105°, and standard error is 0.7255°. The manufacturing process only involves two steps: the nano-imprinting process and the metal-evaporation process; it does not involve coating, stripping, or etching an imprint adhesive. So the manufactured gratings have obvious advantages for low-cost mass production of large-area polarizers, which can be widely used in the production of semiconductor optoelectronic devices such as optical-detection devices and optoelectronic switching devices.

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中图分类号:O433.1; TH706

DOI:10.3788/CJL202047.1113004

所属栏目:微纳光学

基金项目:国家自然科学基金青年科学基金、博士科研启动基金项目、来晋优秀博士奖励资金项目、山西省重大科技项目、山西省重点研发项目、山西省重点研发项目;

收稿日期:2020-04-16

修改稿日期:2020-07-09

网络出版日期:2020-11-01

作者单位    点击查看

杨江涛:太原科技大学电子信息工程学院, 山西 太原 030024
王健安:太原科技大学电子信息工程学院, 山西 太原 030024
王银:太原科技大学电子信息工程学院, 山西 太原 030024
胡啸:太原科技大学电子信息工程学院, 山西 太原 030024

联系人作者:杨江涛(yangjiangtao6567@tyust.edu.cn)

备注:国家自然科学基金青年科学基金、博士科研启动基金项目、来晋优秀博士奖励资金项目、山西省重大科技项目、山西省重点研发项目、山西省重点研发项目;

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引用该论文

Yang Jiangtao,Wang Jian''an,Wang Yin,Hu Xiao. Sub-Wavelength Metal-Grating Polarizer Fabricated on a Flexible Substrate[J]. Chinese Journal of Lasers, 2020, 47(11): 1113004

杨江涛,王健安,王银,胡啸. 基于柔性材料的亚波长金属光栅偏振器的关键技术研究[J]. 中国激光, 2020, 47(11): 1113004

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