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Hybrid calibration method of a wide-view-angle Mueller polarimeter for hyper-numerical-aperture imaging systems
Abstract
Polarization aberration of hyper-numerical-aperture projection optics should be measured accurately in order to control it exactly and ensure favorable imaging performance. A hybrid calibration method combining the Fourier analysis method and the eigenvalue calibration method is proposed. A wide-view-angle Mueller polarimeter (WMP) is exemplified to demonstrate the capability of the proposed calibration method, which can calibrate the polarimeter and determine the error budget of polarizing elements in the polarimeter. In addition, an experimental setup and a WMP are developed in-house to implement the hybrid calibration method.
所属栏目：Optical Sensing, Measurements, and Metrology
基金项目：This work was supported by the Major Scientific Instrument Development Project of National Natural Science Foundation of China (No. 11627808), National Natural Science Foundation of China (No. 61435005), and National Science and Technology Major Project (No. 2017ZX02101006-001).
收稿日期：2020-04-22
录用日期：2020-06-10
网络出版日期：2020-07-09
作者单位 点击查看
李艳秋：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
刘克：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
周国栋：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
刘丽辉：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
郑猛：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
联系人作者：李艳秋(liyanqiu@bit.edu.cn)
备注：This work was supported by the Major Scientific Instrument Development Project of National Natural Science Foundation of China (No. 11627808), National Natural Science Foundation of China (No. 61435005), and National Science and Technology Major Project (No. 2017ZX02101006-001).
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引用该论文
Jianhui Li, Yanqiu Li, Ke Liu, Guodong Zhou, Lihui Liu, Meng Zheng, "Hybrid calibration method of a wide-view-angle Mueller polarimeter for hyper-numerical-aperture imaging systems," Chinese Optics Letters 18(8), 081202 (2020)
