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Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane

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Abstract

In this Letter, a low-frequency acoustic sensor based on an extrinsic Fabry–Pérot (FP) interferometer with a silicon nitride (Si3N4) membrane is demonstrated. Using micromachining techniques, the 800 nm thick Si3N4 membrane is deposited on an 8 mm × 8 mm × 400 μm silicon (Si) substrate. All the assembly procedures of the sensor are focused on the substrate to avoid any damage to the membrane itself, compared to general membrane transfer methods. The frequency response of the proposed sensor is discussed theoretically and experimentally demonstrated. The sensor exhibits an excellent flat response to the tested acoustic frequency range of 1 Hz to 250 Hz. The phase sensitivity is around ?152 dB re 1 rad/μPa with sensitivity fluctuation less than 0.8 dB. The frequency response characteristic shows a promising potential of the sensor in low-frequency acoustic signal sensing applications.

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DOI:10.3788/COL202018.101201

所属栏目:Optical Sensing, Measurements, and Metrology

基金项目:This work was supported by the National Key R&D Program of China (No. 2018YFF01011800), the National Natural Science Foundation of China (No. 61775070), and the Fundamental Research Funds for the Central Universities (Nos. 2017KFYXJJ032 and 2019kfyXMBZ052).

收稿日期:2020-05-11

录用日期:2020-06-23

网络出版日期:2020-08-27

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瞿致远:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
鲁 平:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
李玉建:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
傅 鑫:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
张万金:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
刘德明:Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
张江山:Department of Electronics and Information Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

联系人作者:鲁 平(pluriver@mail.hust.edu.cn)

备注:This work was supported by the National Key R&D Program of China (No. 2018YFF01011800), the National Natural Science Foundation of China (No. 61775070), and the Fundamental Research Funds for the Central Universities (Nos. 2017KFYXJJ032 and 2019kfyXMBZ052).

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引用该论文

Zhiyuan Qu, Ping Lu, Yujian Li, Xin Fu, Wanjin Zhang, Deming Liu, Jiangshan Zhang, "Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane," Chinese Optics Letters 18(10), 101201 (2020)

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