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High-<i>Q</i> lithium niobate (LN) optical micro-resonators are excellent platform for future applications in optical communications, nonlinear optics and quantum optics. To date, high <i>Q</i> factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered <i>Q</i> factors. Here we show that LN microring resonators with strong light confinement and intrinsic <i>Q</i> factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~ 0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
Chinese Optics Letters