中国光学期刊网

We report on the fabrication and optimum of lithium niobate planar and ridge waveguide at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions at the energy of 3.0 MeV with a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguide, a loss of 0.5 dB/cm is obtained after annealing at 300 oC for 30minutes. The ridge waveguide is fabricated by diamond blade dicing method on optimized planar waveguide. The guiding properties are investigated by prism coupling and end-face coupling method.