双折射消偏振膜的设计和制备
Design and Manufacture of Birefringent Non-Polarizing Thin Films
摘 要
基于倾斜沉积薄膜材料的双折射特性,采用单一TiO2设计和制备了中心波长为632 nm的双折射消偏振膜。首先以60°和70°的沉积角度镀制了TiO2单层膜,通过单层膜的透射光谱分别拟合出两种沉积角度下薄膜对s和p偏振光的等效折射率nPH,nSH和nPL,nSL。通过对折射率的组合,实现正入射时s偏振光透射率大于p偏振光,而入射角度增大会使两者透射率差值减小,基于这一思想设计并制备了消偏振膜。分别测量了消偏振薄膜在400-800 nm波段范围内正入射及倾斜入射条件下s和p偏振光的透射光谱。入射角为60°时,s偏振光反射带宽基本与p偏振光反射带宽重合,在波长632 nm左右基本实现消偏振。结果表明,利用材料的双折射特性,可以设计和制备出倾斜入射条件下消偏振薄膜。 标 签
薄膜光学 消偏振 倾斜沉积 双折射 thin film optics non-polarizing glancing angle deposition birefringence
Abstract
Based on the birefringent characteristic of thin film fabricated by glancing angle deposition(GLAD),a birefringent non-polarizing thin film at wavelength 632 nm only using titanium oxide is designed and deposited. At the beginning,two titanium oxide monolayers were deposited with the deposition angle 60° and 70° respectively. The effective refractive index of the monolayer for s- and p-polarization,nPH,nSH and nPL,nSL ,were obtained. a higher s transmittance than p polarization at normal incidence is got by arranging the index correctly,since the increase of the incidence would bring an opposite effect,we could get a non-polarizing effect at a very angle can be got. Based on the analysis above,a non-polarizing thin film was designed and prepared. The s- and p-polarization transmission spectra of non-polarizing film were measured with photometer at normal and tilted incidence. At the incidence angle of 60°,the reflection band width of s- and p-polarizations were less different and the non-polarizing effect was achieved partially. The obliquely incident non-polarizing thin film can be designed based on the thin film material′s birefringence.
中图分类号
O484.1
所属栏目
薄膜
基金项目
国家自然科学基金(60778026)和上海市青年科技启明星计划(07QB14006)资助课题。
收稿日期
2009-7-15
修改稿日期
2009-10-9
 作者单位查看王晴云:中国科学院 上海光学精密机械研究所 强激光材料重点实验室,上海 201800中国科学院 研究生院,北京 100049 齐红基:中国科学院 上海光学精密机械研究所 强激光材料重点实验室,上海 201800上海大恒光学精密机械有限公司,上海 201800 贺洪波:中国科学院 上海光学精密机械研究所 强激光材料重点实验室,上海 201800 邵建达:中国科学院 上海光学精密机械研究所 强激光材料重点实验室,上海 201800 范正修:中国科学院 上海光学精密机械研究所 强激光材料重点实验室,上海 201800
  作者简介王晴云|主要从事光学薄膜方面的研究|(1985-),男,硕士研究生。
引用该论文
Wang Qingyun,Qi Hongji,He Hongbo,Shao Jianda,Fan Zhengxiu. Design and Manufacture of Birefringent Non-Polarizing Thin Films[J]. 光学学报, 2010, 30(7): 2154~2158 (in chinese) 王晴云,齐红基,贺洪波,邵建达,范正修. 双折射消偏振膜的设计和制备[J]. 光学学报, 2010, 30(7): 2154~2158
参考文献 【1】H. A. Macleod. Thin-Film Optical Filters [M]. Third edition,London:Institute of Physics Publishing,2001,366-367 【2】M. Shokooh-Saremi,M. Nourian M. M. Mirsachi et al.. Design of multilayer polarizing beam splitters using genetic algorithm [J]. Opt. Commun.,2004,233(1-3):57-65 【3】V. R. Costich. Reduction of polarization effects in interference coatings [J]. Appl. Opt.,1970,9(4):866-870 【4】A. Thelen. Nonpolarizing interference films inside a glass cube [J]. Appl. Opt.,1976,15(12):2983-2985 【5】M. Gilo. Design of a nonpolarizing beam splitter inside a glass cube [J]. Appl. Opt.,1992,31(25):5345-5349 【6】Xueke Xu,Jianda Shao,Zhengxiu Fan. Nonpolarizing beam splitter designed by frustrated total internal reflection inside a glass cube [J]. Appl. Opt.,2006,45(18):4297-4302 【7】A. V. Tikhonravov,M. K. Trubeskov,G. W. Debell. Application of the needle optimization technique to the design of optical coatings [J]. Appl. Opt.,1996,35(28):5493-5508 【8】Zhengping Wang,Jinhui Shi,Shunling Ruan. Designs of infrared non-polarizing beam splitters [J]. Opt. & Laser Technol.,2007,39(2):394-399 【9】Gu Peifu,Chen Weibin,Liu Xu. Design of depolarization thin film cutoff filters [J]. Acta Optica Sinica,2005,25(2):274-278 顾培夫,陈卫斌,刘旭 等. 薄膜截止滤光片的消偏振设计 [J]. 光学学报,2005,25(2):274-278 【10】Ma Xiaofeng,Wang Dan,Liu Dingquan et al.. Design of non-polarizing broadband antireflection coating using equivalent layer [J]. Acta Optica Sinica,2006,27(3):563-566 马小凤,王 丹,刘定权 等. 利用等效层的消偏振宽带减反膜设计 [J]. 光学学报,2006,27(3):563-566 【11】Qi Hongji,Hong Ruijing,Yi Kui et al.. Nonpolarizing and polarizing filter design [J]. Appl. Opt.,2005,44(12):2343-2348 【12】Lan Hodgkinson,Qihong Wu. Serial bideposition of anisotropic thin films with enhanced linear birefringence [J]. Appl. Opt.,1999,38(16):3621-3625 【13】Wang Sumei,He Hongbo,Shao Jianda et al.. ZnS birefringent sculptured thin film prepared by glancing angle deposition technique [J]. Chinese J. Lasers. 2005,32(12):1699-1702 王素梅,贺洪波,邵建达 等. 倾斜角沉积技术制备ZnS双折射雕塑薄膜 [J]. 中国激光,2005,32(12):1699-1702 【14】Tang Jinfa,Gu Peifu,Liu Xu et al.. Modern Optical Thin Film Technology [M]. Zhejiang:Zhejiang University Press,2006,52-55 唐晋发,顾培夫,刘旭 等. 现代光学薄膜技术 [M]. 杭州:浙江大学出版社,2006,52-55 【15】Wang Sumei,Xia Guodong,He Hongbo et al.. Structural and optical properties of nanostructured TiO2 thin film fabricated by glancing angle deposition [J]. Journal of Alloys and Compounds,2007,431(1-2):287-291
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