离子束溅射制备Nb2O5、Ta2O5和SiO2薄膜的光学、力学特性和微结构
Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering
Structural diagram of DIBS system
离子束溅射制备Nb2O5、Ta2O5和SiO2薄膜的光学、力学特性和微结构 |
| 袁文佳, 沈伟东, 郑晓雯, 杨陈楹, 章岳光, 方波, 沐雯, 陈超楠, 刘旭 |
Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering |
| DIBS系统结构示意图 |
Structural diagram of DIBS system |
| |