离子束溅射制备Nb2O5、Ta2O5和SiO2薄膜的光学、力学特性和微结构 |
袁文佳, 沈伟东, 郑晓雯, 杨陈楹, 章岳光, 方波, 沐雯, 陈超楠, 刘旭 |
Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering |
以(a)EBE、(b)IBAD和(c)DIBS方式制备的Ta2O5薄膜截面形貌 |
Cross-sectional morphologies of Ta2O5 thin films prepared by (a) EBE, (b) IBAD and (c) DIBS |