太赫兹是电磁频谱上还未被完全开发利用的频段, 但太赫兹谱学成像技术在材料科学和器件测试等方面已展现出重要应用价值。然而受远场衍射极限限制, 该频段难以聚焦于纳米、原子尺度的新材料和微纳器件中, 极大阻碍了太赫兹科学的发展与技术应用。为提高成像分辨率, 使其成为材料科学等交叉领域强大的研究工具, 近年诞生了太赫兹耦合的近场显微技术, 实现了纳米到埃米量级的空间分辨。本文综述了太赫兹耦合的近场显微技术, 包括扫描近场显微镜和扫描隧道显微镜各自的发展历程和应用实例, 并探讨了太赫兹近场显微技术的未来机遇和挑战。

Terahertz(THz) wave is an electromagnetic frequency band that has not been fully developed and utilized, but has shown important application value in material science and device testing. However, due to the limit of far-field diffraction, it is difficult for THz wave to be focused into new materials and nano-devices with nanometer or even atomic scale, which greatly hinders the development of THz science and its applications. Recently, to improve the spatial resolution of THz spectroscopy and imaging, near-field microscopy coupled with THz has been developed, which can achieve nanometer to angstrom spatial resolution. This paper summarizes the principle, development process and application examples of THz coupled near-field microscopy, including scanning near-field microscopy and scanning tunneling microscopy, and discusses the future opportunities and challenges in THz near-field microscopy.