半导体光电, 2022, 43 (6): 1020, 网络出版: 2023-01-27  

石墨烯/硅基异质集成光电子器件

Integrated Optoelectronic Devices Based on the Hybrid Integration of Silicon and Graphene
作者单位
华中科技大学 光学与电子信息学院, 武汉 430074
摘要

石墨烯/硅基异质集成的光子器件研究在近年来取得了巨大进展, 因石墨烯所具有的诸多独特的物理性质如超高载流子迁移率、超高非线性系数等, 石墨烯/硅基异质集成器件展现出了诸如超大带宽、超低功耗等优异性能。文章介绍了近年来报道的典型石墨烯/硅基异质集成器件, 包括石墨烯/硅基电光调制器、石墨烯/硅基热光调制器和石墨烯/硅基光电探测器, 简要阐述了其原理与性能, 并对其未来的应用与发展做出了展望。

Abstract

The research on graphene/silicon-based hetero-integrated photonic devices has made great progress in recent years. The graphene/silicon-based heterogeneous integrated devices have shown excellent performance such as ultra-large bandwidth and ultra-low power consumption thanks to the unique physical properties of graphene, such as ultra-high carrier mobility and ultra-high nonlinear coefficient. In this work, we reviewed the typical graphene/silicon-based heterogeneous integrated devices reported in recent years, including graphene/silicon-based electro-optical modulators, graphene/silicon-based thermo-optical modulators and graphene/silicon-based photodetectors, briefly described their principles and properties, and made a prospect for their future applications and development.

彭文怡, 严思琦, 唐明. 石墨烯/硅基异质集成光电子器件[J]. 半导体光电, 2022, 43(6): 1020. PENG Wenyi, YAN Siqi, TANG Ming. Integrated Optoelectronic Devices Based on the Hybrid Integration of Silicon and Graphene[J]. Semiconductor Optoelectronics, 2022, 43(6): 1020.

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