半导体光子学与技术, 2009, 15 (4): 229, 网络出版: 2011-08-19  

Applications of Inverted Pyramids Corroded by TMAH in PERL Silicon LED

Applications of Inverted Pyramids Corroded by TMAH in PERL Silicon LED
作者单位
School of Information and Communication Engineering, Tianjin Polytechnic University, Tianjin 300160, CHN
摘要
Abstract
In this paper, a novel and reliable structure of the side passivated emitter and the rear locally-diffused(PERL) silicon light emitting diodes (LEDs) is proposed. The inverted pyramids surface, the important interface in this structure, is given according to the experiment. The results show that the inverted pyramids surface has a low refection about 8%, in the anisotropic etching 70℃, 5% TMAH concentration, corrosion time of 90 min or 30 min. Low refection means high light emitting rate. Most of the structure and manufacturing process can be compatible with planar CMOS technology, which makes the silicon LED greater potential for development in the future.
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GENG Bo-yun, LI Xiao-yun, NIU Ping-juan. Applications of Inverted Pyramids Corroded by TMAH in PERL Silicon LED[J]. 半导体光子学与技术, 2009, 15(4): 229. GENG Bo-yun, LI Xiao-yun, NIU Ping-juan. Applications of Inverted Pyramids Corroded by TMAH in PERL Silicon LED[J]. Semiconductor Photonics and Technology, 2009, 15(4): 229.

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