半导体光电, 2013, 34 (1): 66, 网络出版: 2013-03-05  

全自动荧光粉涂覆工艺及设备研究

Research on Automatic Phosphor Coating Process and Equipment
作者单位
1 中国科学院微电子研究所 微电子器件与集成技术重点实验室, 北京 100029
2 中国科学院电工研究所, 北京 100190
摘要
自行设计并搭建了一套全自动荧光粉涂覆系统。针对涂覆工艺, 研究了有无真空搅拌除泡装置对荧光粉涂覆效果的影响, 结果发现未经真空搅拌除泡处理的荧光粉涂覆层厚度均匀性较差, 且涂覆层中有明显的气泡, 气泡直径可达1mm; 经过真空搅拌除泡处理后涂覆层厚度均匀性好且涂覆层中无气泡。利用LED光学参数综合测试仪分析了有无真空搅拌除泡装置对LED发光特性的影响, 结果发现真空搅拌除泡工艺能明显提升LED光谱色度一致性。
Abstract
An automatic phosphor coating system was designed and set up. According to coating process, the influence of bubble-removing device on phosphor coating was investigated, and it was found that there are some bubbles with diameter less than 1mm among the phosphor coating without bubble-removing process, and these bubbles can be removed by bubble-removing treatment. The luminescent properties of LED samples were also compared with and without bubble-removing process. Results show that chromaticity consistency can be obviously improved by using bubble-removing process.
参考文献

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刘杰, 刘键, 冷兴龙, 屈芙蓉, 刘俊标, 吴茹菲. 全自动荧光粉涂覆工艺及设备研究[J]. 半导体光电, 2013, 34(1): 66. LIU Jie, LIU Jian, LENG Xinglong, QU Furong, LIU Junbiao, WU Rufei. Research on Automatic Phosphor Coating Process and Equipment[J]. Semiconductor Optoelectronics, 2013, 34(1): 66.

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