Chinese Optics Letters, 2024, 22 (1): 011204, Published Online: Jan. 9, 2024  

High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer

Author Affiliations
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
Abstract
We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further, to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5 m in a range of 2 m.

Ziqi Yin, Fangfei Li, Yunke Sun, Yun Zou, Yan Wang, Hongxing Yang, Pengcheng Hu, Haijin Fu, Jiubin Tan. High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer[J]. Chinese Optics Letters, 2024, 22(1): 011204.

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