压电与声光, 2023, 45 (1): 26, 网络出版: 2023-04-07  

42°Y钽酸锂晶体生长及性能研究

Study on Growth and Properties of 42° Rotated Y Cut Lithium Tantalate Single Crystals
作者单位
中国电子科技集团公司第二十六研究所, 重庆 400060
摘要
钽酸锂晶体具有优异的压电性能, 是声表面波(SAW)滤波器广泛使用的衬底材料。该文采用自主研制的提拉单晶炉, 成功生长出4英寸、42°Y方向、外观完整的钽酸锂晶体。经可见及近红外分光光度计测试, 晶体透过率接近80%; 经X线摇摆测试, 其半高全峰宽(FWHM)为28.4″, 单晶性较好; 采用差热分析仪对生长的晶体头尾进行居里温度测试, 居里温度偏差为4.4 ℃。声表面波性能测试结果表明, 钽酸锂晶体的声表面波速度、机电耦合系数和频率温度系数等指标均满足SAW滤波器的使用要求。
Abstract
The lithium tantalate (LiTaO3) single crystals have excellent piezoelectric properties and are widely used as substrate material for SAW filters. In this work, an 4 inch, 42° rotated Y cut, integral, crack-free LiTaO3 single crystal was successfully grown using the in-house developed Czochralski (CZ) furnace. The transmittance is close to 80% by the visible and near infrared spectrophotometer test, its full width at half maximum (FWHM) is 28.4″ by X-ray rocking test, which show that the grown crystal has good single crystal property. The Curie temperature of the head and tail of the grown crystal is measured by the differential thermal analyzer, and the Curie temperature deviation is 4.4 ℃. The results of SAW performance test show that the SAW velocity, electromechanical coupling coefficient and frequency temperature coefficient of LiTaO3 single crystal meet the requirements of SAW filter.
参考文献

[1] 何朝峰.手机用BAND13(RX)声表面波滤波器的研制[D].江苏: 东南大学,2019.

[2] 张华, 齐梦珂, 潘虹芝,等.基于LiTaO3基片宽带声表面波滤波器设计方法[J].压电与声光,2022,44(5):726-730.

[3] 彭胜春,阳皓,周哲,等.高可靠性、高基频及小延时晶体滤波器[J].压电与声光,2015,37(3): 365-367.

[4] NISHIMURA E,OKANO K,TERASHIMA A,et al.Vertical bridgman growth of 42°RY-oriented LiTaO3 single crystal[J].Crystal Research & Technology,2019,54(10): 1900023.

[5] NAKAMURA H,KOMATSU T,NAKANISHI H,et al.Reduction of transverse leakage for SAW resonators on LiTaO3 substrate[J].IEEE,2012:1248-1251.

[6] YOU Q Y,KAI H,HONG Y Z,et al.Wafer-scale fabrication of 42°rotated Y-Cut LiTaO3-on-insulator(LTOI) substrate for a SAW resonator[J].Applied Electronic Materials,2019,8(1):1660-1666.

[7] 颜涛.高品质铌酸锂、LT晶体的生长、结构与性质研究[D].济南:山东大学,2011.

[8] 孙德辉,刘宏,颜涛,等.近化学计量比钽酸锂晶体-生长技术和成分测试方法[J].人工晶体学报,2011,40(3):572-578.

[9] NAUMENKO N F.Optimal orientation of LiTaO3 for application in plate mode resonators[J].Journal of Applied Physics,2015,118: 034505.

于明晓, 龙勇, 石自彬, 陈哲明, 邹少红, 丁雨憧. 42°Y钽酸锂晶体生长及性能研究[J]. 压电与声光, 2023, 45(1): 26. YU Mingxiao, LONG Yong, SHI Zibing, CHEN Zheming, ZOU Shaohong, DING Yuchong. Study on Growth and Properties of 42° Rotated Y Cut Lithium Tantalate Single Crystals[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 26.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!