Author Affiliations
1 Ultrafast Laser Laboratory, Key Laboratory of Opto-electronic Information Technical Science of Ministry of Education, School of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
2 FEMTO-ST Institute, Université de Bourgogne-Franche-Comté UMR-6174, 25030 Besançon, France
In the femtosecond two-photon polymerization (2PP) experimental system, optical aberrations degrade the fabrication quality. To solve this issue, a multichannel interferometric wavefront sensing technique is adopted in the adaptive laser processing system with a single phase-only spatial light modulator. 2PP fabrications using corrected high-order Bessel beams with the above solution have been conducted, and high-quality microstructure arrays of microtubes with 20 µm diameter have been rapidly manufactured. The effectiveness of the proposed scheme is demonstrated by comparing the beam intensity distributions and 2PP results before and after aberration corrections.
femtosecond laser two-photon polymerization aberration correction Bessel beams 
Chinese Optics Letters
2023, 21(7): 071203

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