Ziqi Yin 1,2Fangfei Li 1,2Yunke Sun 1,2Yun Zou 1,2[ ... ]Jiubin Tan 1,2
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further, to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5 m in a range of 2 m.
multiwavelength absolute distance superheterodyne interferometry phase synchronization 
Chinese Optics Letters
2024, 22(1): 011204
作者单位
摘要
1 哈尔滨工业大学 超精密光电仪器工程研究所,黑龙江哈尔滨5000
2 北京航天计量测试技术研究所,北京100076
为实现调频连续波(Frequency-modulated Continuous-wave,FMCW)激光雷达的高精度测量,针对激光雷达机械加工及装配过程中引入的几何结构误差,提出了基于激光雷达坐标测量误差的系统误差模型及误差修正方法。建立了激光雷达坐标系组,分析了空间坐标测量误差的来源。通过坐标系间的变换矩阵,实现了测量坐标的几何误差传递。然后,归并各坐标系的几何误差,建立了显式的激光雷达几何空间坐标误差表达式。并以此为基础,建立最小二乘优化目标,解算各项误差因子和修正后坐标。求得的误差因子可以用作后续坐标测量结果的修正。最后,基于该方法设计了一套以激光跟踪仪为高精度测量仪器、以靶球球心位置为标准点的标定场,使用激光跟踪仪与激光雷达测量相同位置的靶球完成系统误差修正。实验结果表明,经修正激光雷达空间距离测量的平均误差由0.044 8%下降到0.003 8%,误差极大值由4.17 mm下降到0.30 mm,验证了激光雷达几何结构误差标定和误差修正方法的有效性。
激光雷达 几何结构误差 最小二乘法 误差修正 lidar geometric error least square method error correction 
光学 精密工程
2023, 31(9): 1295
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
Laser ranging with frequency comb intermode beats (IMBs) has been suffering from random phase drifts (RPDs) for two decades. In this study, we reveal the influence of signal transmission path on the RPDs and propose a real-time suppression method using two IMBs of similar frequencies from different combs. As the two IMBs obtain similar RPDs during their transmission through same signal paths, the RPD of the original probing signal IMB is suppressed by deducting the RPD of the newly added local IMB in real time. In our experiments, a real-time suppression of RPDs is achieved using IMBs of 1001 and 1000 MHz. For the sampling time of 100 s, the effect of 19-fold suppression has been achieved. The proposed method provides a new solution for the long-standing phase drift problem in laser ranging with comb IMBs.
intermode beat random phase drift laser ranging 
Chinese Optics Letters
2023, 21(4): 041202
作者单位
摘要
哈尔滨工业大学精密仪器工程研究院
激光与光电子学进展
2023, 60(3): 0312001
作者单位
摘要
激光与光电子学进展
2023, 60(3): 0300000
杨宏兴 1,2付海金 1,2胡鹏程 1,2,*杨睿韬 1,2[ ... ]谭久彬 1,2
作者单位
摘要
1 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江 哈尔滨 150080
2 哈尔滨工业大学超精密仪器技术及智能化工业和信息化部重点实验室,黑龙江 哈尔滨 150080

针对微电子光刻机等高端装备中提出的超精密、高速位移测量需求,哈尔滨工业大学深入探索了传统的共光路外差激光干涉测量方法和新一代的非共光路外差激光干涉测量方法,并在高精度激光稳频、光学非线性误差精准抑制、高速高分辨力干涉信号处理等多项关键技术方面取得持续突破,研制了系列超精密高速激光干涉仪,激光真空波长相对准确度最高达9.6×10-10,位移分辨力为0.077 nm,光学非线性误差最低为13 pm,最大测量速度为5.37 m/s。目前该系列仪器已成功应用于我国350 nm至28 nm多个工艺节点的光刻机样机集成研制和性能测试领域,为我国光刻机等高端装备发展提供了关键技术支撑和重要测量手段。

光学设计与制造 激光干涉 超精密高速位移测量 optical design and fabrication laser interference ultra-precision and high-speed displacement measurement 
激光与光电子学进展
2022, 59(9): 0922018
作者单位
摘要
哈尔滨工业大学超精密仪器技术及智能化工信部重点实验室,黑龙江 哈尔滨 150001

对于步进扫描投影光刻机,掩模台和工件台的同步伺服性能将直接影响整机技术指标。掩模台和工件台是典型的六自由度超精密运动台,在耦合动力学、复杂内外部干扰条件下兼顾高动态和超精密运动是其核心控制难题,研究和发展面向集成电路光刻的超精密运动台控制技术对于实现高端光刻机国产化具有重要意义。本文首先阐述高端光刻机对超精密运动台的伺服性能需求以及实现这些需求所面临的技术挑战,然后从解耦控制、反馈控制、前馈控制、协同控制和轨迹生成五个方面回顾光刻机超精密运动台控制相关研究成果与最新进展,并对其现存的问题和发展方向进行评述。

光刻机 多自由度运动台 超精密运动控制 lithographic machine multi-degree-of-freedom motion stage ultra-precision motion control 
激光与光电子学进展
2022, 59(9): 0922013
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
We propose a precision phase-generated-carrier (PGC) demodulation method with sub-nanometer resolution that avoids nonlinear errors in a laser wavelength sinusoidal modulation fiber-optic interferometer for long range dynamic displacement sensing. Using orthogonal detection and an AC-DC component extraction scheme, the PGC carrier phase delay (CPD) and laser intensity modulation phase delay can be obtained simultaneously to eliminate the nonlinear error from accompanied optical intensity modulation and CPD. Further, to realize long range displacement sensing, PGC phase modulation depth (PMD), determined by the laser wavelength modulation amplitude and the working distance of the interferometer, is required to maintain an optimal value during measurement, including initial position and dynamic movement. By combining frequency sweeping interference and modified PGC-arctan demodulation to measure real-time working distance, adaptive PMD technology is realized based on proportion control. We construct a fiber-optic Michelson and SIOS commercial interferometer for comparison and perform experiments to verify the feasibility of the proposed method. Experimental results demonstrate that an interferometer with sub-nanometer resolution and nanometer precision over a large range of 400 mm can be realized.
Photonics Research
2022, 10(1): 01000059
Author Affiliations
Abstract
1 Advanced Microscopy and Instrumentation Research Center, Harbin Institute of Technology, Harbin Institute of Technology, Harbin 150080, China
2 Department of Microwave Engineering, Harbin Institute of Technology, Harbin Institute of Technology, Harbin 150001, China
3 Department of Electrical and Computer Engineering, National University of Singapore, National University of Singapore Singapore, Singapore
4 LEME, UPL, Univ Paris Nanterre, UPL, F92410 Ville d’Avray, France
5 National University of Singapore Suzhou Research Institute, Suzhou Industrial Park, Suzhou Industrial Park, Suzhou Jiangsu, China
Fourier transform, mapping the information in one domain to its reciprocal space, is of fundamental significance in real-time and parallel processing of massive data for sound and image manipulation. As a powerful platform of high-efficiency wave control, Huygens’ metasurface may offer to bridge the electromagnetic signal processing and analog Fourier transform at the hardware level and with remarkably improved performance. We here demonstrate a Huygens’ metasurface hologram, where the image pattern can be self-rotated or projected in free space by modulating the phase distribution based on the rotational invariance, time-shifting and scaling properties of Fourier transform. Our proof-of-concept experiment shows high-efficiency imaging operation in accordance with theoretical predictions, validating the proposed scheme as an ideal way to perform largely parallel spatial-domain mathematical operations in the analog domain using electromagnetic fields.
PhotoniX
2020, 1(1): 16
作者单位
摘要
哈尔滨工业大学 仪器科学与工程学院, 黑龙江 哈尔滨 150001
提出一种基于单柱透镜旋转调制的光学扫描成像系统, 样品的完整波前信息可以通过柱透镜旋转调制的多幅强度图样迭代重建。此外, 柱透镜的旋转角度作为该系统的一个关键参数, 其值通过基于Radon变换的数值计算方法得到, 摆脱了对高精度旋转设备的要求。该成像系统的可行性在仿真和实验结果中均得以验证。与轴向多距离扫描成像系统相比, 该成像系统中各光学元件在轴向位置保持固定, 数据获取速度得以加快且轴向采样率保持固定, 不仅简化了光场重构中的算法设计, 而且极大地加快了收敛速度。
相位恢复 柱透镜 衍射 计算成像 phase retrieval cylindrical lens diffraction computational imaging 
红外与激光工程
2019, 48(6): 0603016

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