1 Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Scienceshttps://ror.org/034t30j35, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
4 College of Future Technology, University of Chinese Academy of Sciences, Beijing 101408, China
5 Weifang Academy of Advanced Opto-Electronic Circuits, Weifang 261021, China
6 e-mail: yufeiwang@semi.ac.cn
7 e-mail: whzheng@semi.ac.cn