Micro-nano optomechanical accelerometers are widely used in automobile, aerospace, and other industrial applications. Here, we fabricate mechanical sensing components based on an electrically pumped GaN light-emitting diode (LED) with a beam structure. The relationship between the blueshift of the electroluminescence (EL) spectra and the deformation of the GaN beam structure based on the quantum-confined Stark effect (QCSE) of the InGaN quantum well (QW) structure is studied by introducing an extra mass block. Under the equivalent acceleration condition, in addition to the elastic deformation of GaN-LED, a direct relationship exists between the LED’s spectral shift and the acceleration’s magnitude. The extra mass block (gravitational force: 7.55×10-11N) induced blueshift of the EL spectra is obtained and shows driven current dependency. A polymer sphere (PS; gravitational force: 3.427×10-12N) is placed at the center of the beam GaN-LED, and a blueshift of 0.061 nm is observed in the EL spectrum under the injection current of 0.5 mA. The maximum sensitivity of the acceleration is measured to be 0.02m/s2, and the maximum measurable acceleration is calculated to be 1.8×106m/s2. It indicates the simultaneous realization of high sensitivity and a broad acceleration measurement range. This work is significant for several applications, including light force measurement and inertial navigation systems with high integration ability.

随着红外探测技术手段的多样化发展，红外隐身技术的需求日益迫切。由于传统的红外隐身技术面临着多途径目标探测和多功能兼容的严峻挑战，因此研究光学微纳结构红外隐身技术有着十分重要的意义。基于局域共振机制的亚波长尺度的光学微纳结构，极大地丰富了人们对光的传输行为的调控。在红外隐身技术领域，光学微纳结构可以针对红外辐射特性进行材料和结构的精细化设计，从而满足理想红外隐身发射光谱的需求，为发展更加多光谱、多功能、自适应的红外隐身技术提供全新的解决方案。文中围绕红外隐身技术的相关研究，首先介绍了多层薄膜吸收体、金属表面等离子激元、基于相变材料薄膜可调吸收体、智能化设计光学微纳结构实现光谱响应的基本原理，在此基础上，重点回顾了近年来基于光学微纳结构的红外隐身技术新特点，包括多光谱红外隐身技术、多功能红外隐身技术、自适应红外隐身技术的发展现状。最后，梳理了光学微纳结构红外隐身技术所存在的不足及面临的困难并对未来的研究方向和发展趋势进行了展望。