Hao Yang 1,2†Xuening Cao 1,2†Zhi-Gang Hu 1,2Yimeng Gao 1,2[ ... ]Bei-Bei Li 1,3,*
Author Affiliations
1 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Scienceshttps://ror.org/05cvf7v30, Beijing 100190, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 Songshan Lake Materials Laboratory, Dongguan 523808, China
4 State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
Whispering gallery mode (WGM) microcavities have been widely used for high-sensitivity ultrasound detection, owing to their optical and mechanical dual-resonance enhanced sensitivity. The ultrasound sensitivity of the cavity optomechanical system is fundamentally limited by thermal noise. In this work, we theoretically and experimentally investigate the thermal-noise-limited sensitivity of a WGM microdisk ultrasound sensor and optimize the sensitivity by varying the radius and a thickness of the microdisk, as well as using a trench structure around the disk. Utilizing a microdisk with a radius of 300 μm and thickness of 2 μm, we achieve a peak sensitivity of 1.18 μPa Hz-1/2 at 82.6 kHz. To the best of our knowledge, this represents the record sensitivity among cavity optomechanical ultrasound sensors. Such high sensitivity has the potential to improve the detection range of air-coupled ultrasound sensing technology.
Photonics Research
2023, 11(7): 1139

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