石理平 1,*耿娇 1,**仇旻 2,3,***
作者单位
摘要
1 西安电子科技大学杭州研究院 先进光电成像与器件实验室,杭州 311231
2 西湖大学 工学院 浙江省3D微纳加工和表征研究重点实验室,杭州 310024
3 浙江西湖高等研究院 前沿技术研究所,杭州 310024
激光诱导周期性表面结构的质量可通过调整激光参数、改善材料表面和优化扫描策略等手段来提高。研究了扫描方向对线偏振激光诱导金属/硅复合薄膜表面氧化LIPSS的影响。结果表明,当扫描方向垂直于激光偏振方向时,纳米结构会出现分叉、不连续等问题;当扫描方向平行于激光偏振方向时,纳米结构呈现短程有序,但在光斑拼接处存在扭曲;而当扫描方向与激光偏振方向存在一定夹角时,容易获得长程均匀有序的周期性纳米结构。数值仿真结果表明造成这些现象的原因是近场效应对自组织过程具有不可忽略的影响。
激光诱导周期性表面结构 表面等离激元 激光诱导化学反应 复合薄膜 Laser-Induced Periodic Surface Structures(LIPSS Surface plasmons Laser-induced oxidation Hybrid thin films 
光子学报
2023, 52(7): 0752303
作者单位
摘要
南方科技大学 机械与能源工程系,深圳 518055
激光诱导周期性表面结构(Laser-Induced Periodic Surface Structures,LIPSS)是一种在激光辐照下自发生成的超衍射极限结构,但其结构类型较为单一。提出了一种新型的二维图案化激光纳米加工方法,通过同时利用激光诱导的热效应及表面等离激元干涉,在正交的两个方向上分别形成褶皱和LIPSS两种周期性结构。这种方法仅通过单步辐照就能在薄膜材料表面生成二维褶皱LIPSS,从而丰富LIPSS的结构类型。同时,通过调整加工材料的膜厚或基底,以及改变入射激光波长或角度,可以分别调制二维纳米结构在两个正交方向上的周期。此外,通过激光偏振也可以调控该结构的取向。该方法能够进一步拓宽基于LIPSS的可加工表面纳米结构的种类及应用。
超快激光 激光诱导周期性表面结构 激光诱导褶皱 薄膜材料 二维纳米结构 飞秒激光 Ultrafast laser Laser-Induced Periodic Surface Structures(LIPSS Laser-induced wrinkle Thin film materials 2D nanostructures Femtosecond laser 
光子学报
2023, 52(7): 0752302
作者单位
摘要
1 南开大学电子信息与光学工程学院微尺度光学信息技术科学重点实验室,天津 300350
2 山东大学晶体材料国家重点实验室,山东 济南 250100
Overview: With the development of modern manufacturing, the size of optical devices is gradually developing towards miniaturization, and integrated optics is also developing to become a topical area of research for many scholars. One of the methods used for producing micro/nano optical devices is femtosecond laser direct writing, a fine three-dimensional processing technique that has been extensively studied by many scholars for its applicability to most materials and can be applied to the fabrication of a wide range of optical devices. Micro/nano-optical devices prepared by femtosecond laser direct writing in crystals have been applied in a broad range of applications in different wavelengths. PMN-PT crystal with relaxed ferroelectric has attracted much attention in recent years for its superior piezoelectric property and large electromechanical coupling coefficient, and its application in the infrared band is more prominent, so the fabrication of the optical devices based on PMN-PT crystal has gradually become a relevant research hotspot. The LIPSS is one of the micro/nano-structures that can be processed by femtosecond laser direct writing. The LIPSS is prevalent in many materials and has been found in metals, semiconductors, dielectrics, etc. Similarly, LIPSS can be induced by femtosecond lasers in PMN-PT crystal. The LIPSS has a wide range of applications in the fields of anti-reflectivity, permanent coloration, and wettability. Nevertheless, the physical processes and the mechanisms involved in the formation of LIPSS have different interpretations in different materials. In this paper, we describe the LIPSS induced by femtosecond laser on the surface of the PMN-PT crystal and characterize it theoretically. We have achieved a change in the period of the LIPSS from 750 nm to 3000 nm after experimenting with different laser parameters. Afterward, we simultaneously obtained the phase transition of the LIPSS in PMN-PT crystal through temperature modulation, and this phase transition can be analyzed by the variation of the Raman spectra. At the same time, we have obtained the Curie temperature for the LIPSS structure that is approximately 10 ℃ lower than that of the PMN-PT crystal and have analyzed the phase transition process through the structural properties of the PMN-PT crystal. The results of our experiments and analyzes on the LIPSS in PMN-PT crystal reported in this paper can provide some experience for the subsequent development of the optical devices related to the LIPSS in PMN-PT crystal.
飞秒激光直写 表面周期结构 PMN-PT晶体 相变 femtosecond laser direct writing LIPSS PMN-PT crystal phase transition 
光电工程
2023, 50(3): 220275
Author Affiliations
Abstract
1 Shanghai Key Laboratory of Materials Laser Processing and Modification, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, People’s Republic of China
2 State Key Lab of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, People’s Republic of China
Currently, supra-wavelength periodic surface structures (SWPSS) are only achievable on silica dielectrics and silicon by femtosecond (fs) laser ablation, while triangular and rhombic laser induced periodic surface structures (LIPSS) are achievable by circularly polarized or linear cross-polarized femtosecond laser. This is the first work to demonstrate the possibility of generating SWPSS on Sn and triangular and rhombic LIPSS on W, Mo, Ta, and Nb using a single linearly polarized femtosecond laser. We discovered, for the first time, SWPSS patches with each possessing its own orientation, which are completely independent of the light polarization direction, thus, breaking the traditional rules. Increasing the laser power enlarges SWPSS periods from 4-6 μm to 15-25 μm. We report a maximal period of 25 μm, which is the largest period ever reported for SWPSS, ~10 and ~4 times the maximal periods (2.4 μm/6.5 μm) of SWPSS ever achieved by fs and ns laser ablation, respectively. The formation of triangular and rhombic LIPSS does not depend on the laser (power) or processing (scan interval and scan methodology) parameters but strongly depends on the material composition and is unachievable on other metals, such as Sn, Al, Ti, Zn, and Zr. This paper proposes and discusses possible mechanisms for molten droplet generation/spread/solidification, Marangoni convection flow for SWPSS formation, and linear-to-circular polarization transition for triangular and rhombic LIPSS formation. Reflectance and iridescence of as-prepared SWPSS and LIPSS are characterized. It was found that besides insufficient ablation on W, the iridescence density of Ta-, Mo-, Nb-LIPSS follows the sequence of melting temperatures: Ta > Mo > Nb, which indicates that the melting temperature of metals may affect the regularity of LIPSS. This work may inspire significant interest in further enriching the diversity of LIPSS and SWPSS.
LIPSS SWPSS femtosecond laser antireflectance triangular LIPSS iridescence rhombic LIPSS 
International Journal of Extreme Manufacturing
2022, 4(1): 015102
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200062, China
2 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
3 State Key Laboratory of Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
Over the past two decades, femtosecond laser-induced periodic structures (femtosecond-LIPSs) have become ubiquitous in a variety of materials, including metals, semiconductors, dielectrics, and polymers. Femtosecond-LIPSs have become a useful laser processing method, with broad prospects in adjusting material properties such as structural color, data storage, light absorption, and luminescence. This review discusses the formation mechanism of LIPSs, specifically the LIPS formation processes based on the pump-probe imaging method. The pulse shaping of a femtosecond laser in terms of the time/frequency, polarization, and spatial distribution is an efficient method for fabricating high-quality LIPSs. Various LIPS applications are also briefly introduced. The last part of this paper discusses the LIPS formation mechanism, as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications.
laser-induced periodic structures (LIPSs) formation mechanisms femtosecond pulse shaping pump-probe imaging structural color birefringent effects optical absorption photoluminescence 
Opto-Electronic Science
2022, 1(6): 220005
Dongshi Zhang 1,2†Xinzhuo Li 3†Yao Fu 3Qinghe Yao 3,*[ ... ]Koji Sugioka 2,*
Author Affiliations
Abstract
1 Shanghai Key Laboratory of Materials Laser Processing and Modification, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
2 RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
3 School of Aeronautics and Astronautics, Sun Yat-sen University, Guangzhou 510275, China
4 State Key Lab of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
Orientations of laser induced periodic surface structures (LIPSS) are usually considered to be governed by the laser polarization state. In this work, we unveil that fluid dynamics induced by femtosecond (fs) laser ablation in liquid (fs-LAL) can easily break this polarization restriction to produce irregular circular-LIPSS (CLIPPS) and crisscross-LIPSS (CCLIPSS). Fs laser ablation of silicon in water shows formation of diverse LIPSS depending on ablation conditions. At a high power of 700 mW (repetition rate of 100 kHz, pulse duration of 457 fs and wavelength of 1045 nm), single/twin CLIPSS are produced at the bottom of macropores of several microns in diameter due to the formation of strong liquid vortexes and occurrence of the vortex shedding effect. Theoretical simulations validate our speculation about the formation of liquid vortex with an ultrahigh static pressure, which can induce the microstructure trenches and cracks at the sidewalls for fs-LAL of Si and tungsten (W) in water, respectively. At a low power of 50 mW, weak liquid vortexes are produced, which only give birth to curved LIPSS in the valleys of grooves. Consequently, it is deduced that liquid vortex plays a crucial role in the formation of macropores. Mountain-like microstructures induce complex fluid dynamics which can cause the formation of CCLIPSS on them. It is believed that liquid vortexes and fluid dynamics presented in this work open up new possibilities to diversify the morphologies of LIPSS formed by fs-LAL.
circular LIPSS crisscross LIPSS laser ablation in liquid femtosecond laser ablation in water liquid vortex vortex shedding 
Opto-Electronic Advances
2022, 5(2): 210066
作者单位
摘要
南京理工大学 电子工程与光电技术学院,江苏 南京 210094
采用波长为355 nm、脉宽为7 ns、重复频率为1 Hz的线性偏振激光在聚酰亚胺薄膜表面制备了微米量级的周期性表面结构,并讨论了激光参数对条纹形貌的影响。实验发现,周期性结构的产生存在一定的能量密度阈值和脉冲个数阈值,当激光能量密度范围在54~586 mJ/cm²,脉冲个数在1~50时,能在聚合物薄膜表面产生周期为4~6.65 μm的规整条纹结构。在保持激光能量密度不变的情况下,增加脉冲个数,或者保持脉冲个数不变,增大入射到材料表面的激光能量密度,都能引起条纹周期增大,并且根据实验结果,随着脉冲个数的增加,烧蚀坑的深度增加,LIPSS能持续出现在坑底。此外,为分析周期性结构形成的可能原因,通过对热传导模型的建立讨论了当周期性结构形成时材料历经的物理状态。文中的相关研究结果对基于LIPSS实现的材料表面润湿性、摩擦力学、光学特性的改善提供了一定的研究基础。
激光诱导表面周期性结构 聚合物薄膜 纳秒激光 表面改性 laser-induced periodic surface structures (LIPSS) polymer film nanosecond laser surface modification 
红外与激光工程
2022, 51(2): 20210911
Author Affiliations
Abstract
1 RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
2 Innovative Photon Manipulation Research Team, RIKEN Center for Advanced Photonics, Wako, Saitama 351-0198, Japan
3 Metamaterials Laboratory, RIKEN Cluster for Pioneering Research, Wako, Saitama 351-0198, Japan
In this study, we demonstrate a technique termed underwater persistent bubble assisted femtosecond laser ablation in liquids (UPB-fs-LAL) that can greatly expand the boundaries of surface micro/ nanostructuring through laser ablation because of its capability to create concentric circular macrostructures with millimeter-scale tails on silicon substrates. Long-tailed macrostructures are composed of layered fan-shaped (central angles of 45°–141°) hierarchical micro/nanostructures, which are produced by fan-shaped beams refracted at the mobile bubble interface (?50° light tilt, referred to as the vertical incident direction) during UPB-fs-LAL line-by-line scanning. Marangoni flow generated during UPB-fs-LAL induces bubble movements. Fast scanning (e.g. 1mms-1) allows a long bubble movement (as long as 2mm), while slow scanning (e.g. 0.1mms?1) prevents bubble movements. When persistent bubbles grow considerably (e.g. hundreds of microns in diameter) due to incubation effects, they become sticky and can cause both gas-phase and liquidphase laser ablation in the central and peripheral regions of the persistent bubbles. This generates low/high/ultrahigh spatial frequency laser-induced periodic surface structures (LSFLs/HSFLs/ UHSFLs) with periods of 550–900, 100–200, 40–100 nm, which produce complex hierarchical surface structures. A period of 40 nm, less than 1/25th of the laser wavelength (1030 nm), is the finest laser-induced periodic surface structures (LIPSS) ever created on silicon. The NIR-MIR reflectance/transmittance of fan-shaped hierarchical structures obtained by UPB-fs-LAL at a small line interval (5 μm versus 10 μm) is extremely low, due to both their extremely high light trapping capacity and absorbance characteristics, which are results of the structures’ additional layers and much finer HSFLs. In the absence of persistent bubbles, only grooves covered with HSFLs with periods larger than 100 nm are produced, illustrating the unique attenuation abilities of laser properties (e.g. repetition rate, energy, incident angle, etc) by persistent bubbles with different curvatures. This research represents a straightforward and cost-effective approach to diversifying the achievable hierarchical micro/nanostructures for a multitude of applications.
hierarchical micro/nanostructures persistent bubble femtosecond laser surface structuring beam refraction fan-shaped microstructure LIPSS 
International Journal of Extreme Manufacturing
2020, 2(1): 015001
作者单位
摘要
1 上海交通大学化学化工学院, 上海 200240
2 上海交通大学分析测试中心, 上海 200030
在100 ℃, 150 ℃和270 ℃下固化得到了四种聚酰亚胺薄膜, 薄膜的固化温度对其性能有重要影响。 采用波长把5 nm的偏振紫外脉冲激光,在四种聚酰亚胺薄膜表面成功制备了纳米微条纹结构, 并研究了固化温度对微结构的形成过程及其形态的影响。
激光诱导周期表面结构(L1PSS) 聚酰亚胺薄膜 紫外激光 Nd:YAG激光器 
中国激光
2002, 29(s1): 494

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