作者单位
摘要
1 暨南大学 光子技术研究院 广东省光纤传感与通信技术重点实验室,广东 广州 511443
2 中国科学院理化技术研究所 仿生智能界面科学中心 有机纳米光子学实验室,北京 100190
Overview: Femtosecond laser two-photon polymerization (TPP) micro-nanofabrication technology is a new type of three-dimensional lithography technology that integrates nonlinear optics, ultra-fast pulsed laser, microscopic imaging, ultra-high-precision positioning, three-dimensional (3D) graphics CAD modeling, and photochemical materials. It has the characteristics of simplicity, low cost, high resolution, true 3D, and so on. Different from the technical route of shortening the wavelength of the traditional lithography, this TPP technology breaks through the optical diffraction limit using the ultrafast laser in the near-infrared and the nonlinear optical effect of the interaction between the laser and the material. TPP can achieve true 3D fabrication of complex 3D structures. After the femtosecond pulse laser is tightly focused in space, photopolymerization is initiated by the two-photon absorption(TPA), which can limit the fabrication area in the center of the focus. The interaction time of the ultrashort pulse with the material is much lower than the thermal relaxation of the material, avoiding the photothermal effect. The lateral linewidth can be reduced to about 100 nm due to the strong threshold characteristics of the two-photon absorption process. Thus, TPP is an ideal fabrication method in the field of 3D micro-nanostructure. Since 2001, Kawata’s team has used a near-infrared femtosecond laser with a wavelength of 780 nm to fabricate a "nanobull" with the size of red blood cells. It fully demonstrated the advantages of TPP in the preparation of three-dimensional micro-nano structures. At the same time, a polymer nanodot with a size of 120 nm was fabricated, which was only 1/7 of the laser wavelength, breaking the optical diffraction limit in this study. Since then, scientists from various countries have improved the line width, resolution, and other parameters of 3D structure by continuously improving the materials, structure, processing technology and light field control, and other aspects. At the same time, with the continuous development and improvement of the 3D nanostructure fabrication technology, the advantages of TPP technology are also reflected in some application fields, such as micro-optical devices, integrated optical devices, micro-electromechanical systems, and biomedical devices. This paper will systematically introduce the femtosecond laser TPP micro-nanofabrication technology, including the fabricating principle, the development of fabricating methods, and its research overview in many application fields. Finally, its existing problems and future development and application prospects are discussed.
飞秒激光 双光子聚合 光学衍射极限 加工分辨力 加工效率 femtosecond laser two-photon polymerization optical diffraction limit resolution efficiency 
光电工程
2023, 50(3): 220048
作者单位
摘要
1 弱光非线性光子学教育部重点实验室, 南开大学物理科学学院, 泰达应用物理研究院, 天津 300071
2 药物化学生物学国家重点实验室, 南开大学生命科学学院, 细胞应答交叉科学中心, 天津 300071

21世纪初诞生的超分辨光学成像技术凭借纳米级空间分辨率、低损制样等优点,迅速发展成为生命科学研究中不可或缺的技术手段。其中单分子定位超分辨成像(SMLM)技术更是由于其成像原理易懂、空间分辨率极高等特点,一直受到科研工作者的青睐,不断取得重要的技术和应用进展。首先回顾了SMLM的工作原理,讨论了其光路搭建、图像重建、漂移校正等关键技术问题。介绍了两类代表性SMLM技术。列举了多种多色SMLM方法,并分析了各自的优缺点。介绍了SMLM成像参数的改进研究,包括横/纵分辨率的提高、成像视野和深度的改善。介绍了SMLM和深度学习,SMLM和电镜等成像手段结合的关联成像研究进展。讨论了SMLM数据提取与分析方法。最后列举了SMLM在细胞生物学中的重要应用,并展望了SMLM未来的发展方向。期望该综述能为SMLM工作者提供有益的启发和参考,推进SMLM在生命科学研究中的深入应用。

显微 荧光显微成像 超分辨成像 单分子定位 光学衍射极限 图像重建 
激光与光电子学进展
2021, 58(12): 1200001
作者单位
摘要
西北大学 光子学与光学技术研究所 国家级光电技术与纳米功能材料国际科技合作研究中心 光电技术与功能材料省部共建国家重点实验室培育基地, 陕西 西安710069
基于激光受激辐射损耗原理的远场光学超分辨成像技术, 当圆形入射高斯激光经过涡旋相位板调制后, 将转变为中心光强为零的圆环形光束, 该形状的激光束与光敏聚合物作用, 能够制备出具有一定功能的纳米结构。介绍了自主搭建的基于圆环连续激光光源的激光直写系统, 以及利用该系统研制的复合纳米结构。当光源为532 nm连续激光输出时, 与正性光刻胶作用, 得到直径<50 nm的纳米柱复合结构, 以及整齐均匀的纳米柱阵列结构; 与负性光刻胶作用, 得到直径<100 nm的纳米通道, 以及整齐均匀的中央有纳米通道的微米柱复合结构阵列。当光源为405 nm连续光纤激光时, 与正性光刻胶作用, 也得到了直径小至153 nm的纳米柱复合结构及其阵列。这些纳米结构的基本单元尺寸都突破了光学“阿贝衍射极限”的限制, 具有实用潜力。
光学衍射极限 连续激光直写技术 相位调制 纳米柱阵列 功能纳米复合结构 Optical diffraction limit CW laser direct writing lithography phase modulation nanopillar array functional composite nanostructure 
应用光学
2017, 38(2): 165

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