作者单位
摘要
1 之江实验室智能芯片与器件研究中心,浙江 杭州 311121
2 浙江大学光电科学与工程学院极端光学技术与仪器全国重点实验室,浙江 杭州 310027
3 上海电力大学电子与信息工程学院,上海 200090
4 浙江大学杭州国际科创中心, 浙江 杭州 311200
Overview: Two-photon lithography (TPL) has been a research hotspot in 3D micro/nano writing technology due to its characteristics of high resolution, low thermal influence, a wide range of processed materials, low environmental requirements, and 3D processing capability. It has shown unique advantages in the fields of life science, material engineering, micro/nano optics, microfluidic, micro machinery, and so on. This paper summarizes the research works done by researchers on different writing methods to improve TPL processing efficiency. Single-beam writing is the main method for TPL, which mainly depends on the speed of the scanning device. Single-beam writing has the advantages of simple system and high-quality beam, and it is easy to combine various effects to improve writing results. It mainly includes scanning modes based on the translation stage, galvo, polygon laser scanner, and acousto-optic deflector (AOD) (Fig. 2). All these modes have advantages and disadvantages. As for the scanning speed comparison, polygon laser scanner and AOD have relatively faster writing rates (faster than m/s). Multi-foci parallel lithography can obviously promote efficiency, elevating the speed by dozens or even hundreds of thousands of times, mainly based on spatial light modulator (SLM), digital micromirror device (DMD), microlens array (MLA), diffractive optical elements (DOE), multi-beam interference, and so on (Figs. 3-15). Multi-foci parallel lithography based on SLM is most widely used owing to its high efficiency and ability to flexible and independent control of each single beam, but the refresh rate is still insufficient. DMD has a higher refreshing rate (32 kHz), but the state-of-the-art beam parallelism realized by DMD is severely limited. More parallel beams are further required for improving the processing efficiency. The 2D pattern exposure method based on SLM or DMD can further improve the TPL efficiency with the superiority of generating flexibly designed pattern (Figs. 16-18). However, the 2D projection exposure technology is still difficult to achieve high writing precision, especially the axial resolution. An available method to improve the axial precision is spatially and temporally focusing an ultrafast laser to implement a strong intensity gradient at the spatial focal plane that restricts polymerization within a thin layer. The 3D projection method will be the most efficient writing method in the future, especially in 3D device processing (Figs. 19-20). Researchers used this technique to make hollow tubular and conical helices structures, increasing the processing speed by 600 times. However, the research results show that the current 3D projection can only process simple 3D structures. Further researches on 3D exposure processing of complex structures are expected, which will effectively expand its application in various fields. Authors believe that with the effort of researchers on efficiency improvement gradually, TPL can further highlight its advantages to promote the development of life science, materials engineering, micro-nano optics, and many other fields.
飞秒激光直写 双光子光刻 单光束扫描 多焦点并行 面曝光 体曝光 femtosecond laser direct writing two-photon lithography single-beam scanning multi-focus parallelism pattern projection 3D projection exposure 
光电工程
2023, 50(3): 220133
作者单位
摘要
河北工业大学 机械工程学院,天津 300130
结构光投影方法在三维形貌测量中应用广泛,但是由于被测物体表面反射率变化范围较大,过度曝光会导致相位信息无法获取。而传统的高动态范围扫描技术步骤复杂,耗时较长。文中提出一种自适应条纹投影技术,向待测物体表面投射较高灰度级的条纹图,判断并标记过度曝光点。降低投射强度后通过非线性最小二乘法拟合来确定每个饱和像素点最适合的最大输入灰度,用重新生成的自适应条纹图来采集图像并进行相位计算和三维形貌恢复。通过实验验证,该方法可以对物体表面的高反光区域进行有效测量,避免过度饱和,仿真误差在0.02 mm范围内,实测误差约为0.14 mm,实际实验对过曝点的补偿率可达到99%。
高反光物体 过度曝光 自适应 条纹投影 三维测量 high reflective object overexposure adaptive fringe-pattern projection 3D measurement 
应用光学
2018, 39(3): 373
作者单位
摘要
1 东南大学江苏省工程力学分析重点实验室, 江苏 南京 210096
2 南京理工大学工程力学系, 江苏 南京 210094
提出了基于单幅彩色条纹投影的不连续物体及动态三维形貌的测量方法。该方法利用计算机产生一幅正弦条纹图和两幅单一强度图分别通过红蓝绿三个通道合成为一幅彩色条纹图,由液晶投影仪投影到被测物体表面,彩色CCD采集变形条纹图并保存在计算机中。通过三色分离,同时获得正弦条纹图和反映表面反射率分布及背景信息图,通过图像除法运算及亚像素精度归一化处理实现物体三维形貌的恢复。对于表面形貌不连续的物体,利用蓝色分量的灰度图像进行二值化处理定位阴影或暗背景,从而引导正确的相位求解。实验验证了该方法对不连续物体动态测量方面的可行性。
测量 三维形貌测量 彩色条纹投影 相位分析 亚像素灰度插值 不连续信息引导图 
光学学报
2012, 32(4): 0412005
作者单位
摘要
清华大学精密仪器系精密测试技术与仪器国家重点实验室 北京 100084
提出一种使用梳状条纹插值法测量昆虫运动的方法,并实现了对扇动中的蜻蜓翅膀的弓形变形和扭转变形的测量。结果表明在扇翅运动中蜻蜓翅膀产生较大的弹性变形。这种测量可以帮助流体力学建立更为精确的翅膀模型,从而对蜻蜓飞行中的升力来源给出更为精确、科学的解释。
投影条纹法 昆虫 蜻蜓 变形 攻角 梳状条纹 
中国激光
2001, 28(5): 476

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