作者单位
摘要
1 之江实验室智能芯片与器件研究中心,浙江 杭州 311121
2 浙江大学光电科学与工程学院极端光学技术与仪器全国重点实验室,浙江 杭州 310027
3 上海电力大学电子与信息工程学院,上海 200090
4 浙江大学杭州国际科创中心, 浙江 杭州 311200
Overview: Two-photon lithography (TPL) has been a research hotspot in 3D micro/nano writing technology due to its characteristics of high resolution, low thermal influence, a wide range of processed materials, low environmental requirements, and 3D processing capability. It has shown unique advantages in the fields of life science, material engineering, micro/nano optics, microfluidic, micro machinery, and so on. This paper summarizes the research works done by researchers on different writing methods to improve TPL processing efficiency. Single-beam writing is the main method for TPL, which mainly depends on the speed of the scanning device. Single-beam writing has the advantages of simple system and high-quality beam, and it is easy to combine various effects to improve writing results. It mainly includes scanning modes based on the translation stage, galvo, polygon laser scanner, and acousto-optic deflector (AOD) (Fig. 2). All these modes have advantages and disadvantages. As for the scanning speed comparison, polygon laser scanner and AOD have relatively faster writing rates (faster than m/s). Multi-foci parallel lithography can obviously promote efficiency, elevating the speed by dozens or even hundreds of thousands of times, mainly based on spatial light modulator (SLM), digital micromirror device (DMD), microlens array (MLA), diffractive optical elements (DOE), multi-beam interference, and so on (Figs. 3-15). Multi-foci parallel lithography based on SLM is most widely used owing to its high efficiency and ability to flexible and independent control of each single beam, but the refresh rate is still insufficient. DMD has a higher refreshing rate (32 kHz), but the state-of-the-art beam parallelism realized by DMD is severely limited. More parallel beams are further required for improving the processing efficiency. The 2D pattern exposure method based on SLM or DMD can further improve the TPL efficiency with the superiority of generating flexibly designed pattern (Figs. 16-18). However, the 2D projection exposure technology is still difficult to achieve high writing precision, especially the axial resolution. An available method to improve the axial precision is spatially and temporally focusing an ultrafast laser to implement a strong intensity gradient at the spatial focal plane that restricts polymerization within a thin layer. The 3D projection method will be the most efficient writing method in the future, especially in 3D device processing (Figs. 19-20). Researchers used this technique to make hollow tubular and conical helices structures, increasing the processing speed by 600 times. However, the research results show that the current 3D projection can only process simple 3D structures. Further researches on 3D exposure processing of complex structures are expected, which will effectively expand its application in various fields. Authors believe that with the effort of researchers on efficiency improvement gradually, TPL can further highlight its advantages to promote the development of life science, materials engineering, micro-nano optics, and many other fields.
飞秒激光直写 双光子光刻 单光束扫描 多焦点并行 面曝光 体曝光 femtosecond laser direct writing two-photon lithography single-beam scanning multi-focus parallelism pattern projection 3D projection exposure 
光电工程
2023, 50(3): 220133
作者单位
摘要
南京理工大学 智能弹药技术国防重点学科实验室, 江苏 南京 210094
针对水下单光束扫描探测系统探测水中近场目标的需求, 为抑制海水后向散射干扰, 提高系统信噪比, 对系统光路参数进行了优化设计。通过推导系统盲区距离公式、水中目标回波和后向散射功率方程, 分析了系统探测区域和信噪比同光路参数的关系。在不同水质条件下, 基于粒子群算法(PSO)对光路参数进行了优化计算。结果表明: 对探测区域为6-10 m的系统, 当发射光束与接收视场平行, 接收视场半角为9 mrad, 收发间距为10.6 cm时, 系统信噪比达到最佳。为验证理论模型的正确性, 设计了水下激光探测光路模拟系统, 测试不同光路参数下系统信噪比, 实验结果与理论值一致。优化结果可为水下单光束扫描探测系统光路设计提供理论依据。
单光束扫描 光路参数 探测区域 信噪比 single-beam scanning optical parameters detecting field SNR 
红外与激光工程
2016, 45(6): 0612001
作者单位
摘要
1 新疆大学信息科学与工程学院,乌鲁木齐,830046
2 山东科技大学工程物理研究所,山东,泰安,271019
采用物理吸附方法制备出多孔硅和偶氮化合物染料分散红(DR1)的复合薄膜.用单光束扫描法研究了多孔硅/DR1复合膜的三阶非线性光学性质,测量了在1064 nm处多孔硅/DR1复合膜的双光子吸收系数和非线性折射率.实验结果表明,同多孔硅相比,多孔硅/DR1复合膜三阶非线性光学效应明显得到了增强.
多孔硅 分散红1 单光束扫描 三阶非线性光学 Porous Silicon Disperse red 1 ( DR1) Single beam technique( Z-scan) Third order optical Nonlinearities 
光子学报
2005, 34(10): 1490
作者单位
摘要
1 山东科技大学工程物理研究所,山东泰安,271019
2 新疆大学信息科学与工程学院,乌鲁木齐,830046
用单光束扫描法测量了在532 nm处一种新型非晶态分子材料5,5′-Bis(dimesitylboryl)-2,2′-bithiophene的非线性折射率和吸收系数.样品非线性透射特性的分析表明,在靠近线性吸收区的532 nm处有饱和吸收存在.由三能级饱和模型和Z-scan法确定了饱和强度、非线性折射率的实部和虚部.研究结果表明:这种新型非晶态分子材料具有非常好的光子学应用前景.
单光束扫描 非线性折射率 非线性吸收系数 饱和强度 
光子学报
2003, 32(11): 1332
作者单位
摘要
1 新疆大学电子信息科学系,乌鲁木齐,830046
2 上海交通大学应用物理系,上海,200030
用单光束扫描法研究薄膜材料的非线性光学性质时,如果入射样品的激光功率过大,将会烧蚀薄膜而产生孔洞,虽然其归一化透过率曲线类似于没有烧蚀的情况,但与样品的非线性光学性质无关,因而造成测量结果错误。本文从理论上分析了因孔洞而产生的正透镜或负透镜效应并给出了归一化透过率的表达式。
单光束扫描 薄膜 烧蚀 Z-scan technique thin film ablation 
量子电子学报
2000, 17(1): 81
作者单位
摘要
1 中国科学院上海光机所, 上海 201800
2 中山大学物理系, 广州 510275
用溶胶凝胶法制备了掺染料硫堇(Thionine)的有机改性凝胶材料,利用单光束扫描法(Z-scan)测试样品的光学非线性折射率,获得的n2值约为4×10-7esu,对实验结果的分析表明,材料的非线性折射来源于有机染料的离域P电子效应。
光学非线性 单光束扫描 有机改性硅凝胶 
中国激光
1997, 24(5): 411
作者单位
摘要
上海交通大学应用物理系, 上海 200030
利用单光束扫描法研究了球状电介质悬浮液的非线性光学性质,对直径为0.059 μm,浓度为2.5%的聚苯乙烯悬浮液的非线性光学系数n2进行了测量,给出n2值为4.3×10-9 cm2/W.从实验中得出这种悬浮液中n2引起的折射率变化远大于热效应引起的折射率变化.
电介质悬浮液 单光束扫描 非线性折射率 
中国激光
1995, 22(9): 666

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