本文介绍了石墨烯材料的制备、石墨烯压力传感器的性能以及在可穿戴电子器件中的应用前景。总结了石墨烯材料的制备方法，阐述了石墨烯压力传感器在机械、导电性能、显示方面的优势。研究了在压力传感器的结构中加入石墨烯、石墨烯衍生物或石墨烯复合材料提高传感器性能的策略。介绍了石墨烯压力传感器在可穿戴电子器件中的应用，包括人体行为和健康检测、人机界面、电子皮肤以及可穿戴显示器方面的优秀性能和前景。

设计了利用激光焊接技术进行波纹膜片焊接的工艺方案，提出了基于正交试验的关键焊接工艺参数优化方法，设计关键焊接工艺正交试验表，完成以焊缝残余应力为评价指标的正交试验。基于正交试验获得的较优焊接工艺参数组合，焊接压力传感器，完成了焊接密封性、拉伸强度和传感器静态性能指标的测试验证。结果表明，较优的压力传感器波纹膜片激光焊接工艺参数组合是激光功率350 W、脉冲频率150 Hz、脉冲宽度1.5 ms、转台转速4 200 （°）/min；压力传感器焊缝的拉伸强度高达499.60 MPa，具备较好的密封性；焊接波纹膜片后的传感器零点输出提高了17%左右，灵敏度、满量程输出、非线性、迟滞和重复性等指标变化不大，但是非线性、迟滞和重复性比同厂家的同类型传感器改善约1倍左右。正交试验确定的激光焊接工艺能够保障压力传感器的高质量封装应用。

Overview: Microstructure sensor is a kind of sensor with a 2D or 3D micron-scale structure prepared by advanced manufacturing technology. It is used as a sensitive part to enhance the transmission characteristics of physical, chemical, and biological signals to the environment, and convert the external signals into electrical signals. The microstructure is generally a regular or disordered structure, usually in the shape of microspheres, microcolumns, microcones, microgrooves and micropores. The microstructures with different shapes can realize the functions of puncture, pressure transmission, vibration transmission, drug transmission, bioelectric transmission, heat transmission, sound transmission, gas adsorption, and so on. In recent years, researchers from all over the world have gradually attached great importance to the research on the manufacturing technology of microstructure sensors. At present, researchers have proposed the MEMS manufacturing processes, such as reactive ion etching and chemical vapor deposition, to achieve mass manufacturing of high-precision microstructures on flexible polymer materials and rigid materials. In addition, some researchers have also proposed the manufacturing processes such as template method, self-assembly, nanoimprinting, and soft lithography to realize microstructure manufacturing. However, the above-mentioned manufacturing processes usually cannot prepare microstructure in one step, which has the problems of complex process, high production cost, limited processing materials, and unable to control the microstructure morphology. In contrast, laser manufacturing technology has the advantages of non-contact processing, no mask, customizable manufacturing, etc. By optimizing the parameters of laser process (such as laser power, scanning speed, filling mode and scanning path), it can achieve efficient and low-cost manufacturing of microstructures with different sizes and shapes. Therefore, using laser manufacturing technology to realize microstructure manufacturing and applying it to bioelectricity, temperature, and pressure sensors has become a research hotspot in microstructure sensor manufacturing technology. Laser manufacturing technology mainly includes laser ablation, laser direct writing, laser induction, laser-template processing, etc. Laser ablation is an auxiliary heating process based on the thermochemical and thermophysical effects of a laser beam, which melts the materials to be processed to realize structural forming. Laser direct writing is a manufacturing process that focuses high-energy photon beams on the materials to be processed to produce a photochemical process, and manufacturing the structures through material removal. Laser-induced modification is a manufacturing process to change the physical and chemical properties of the materials to be processed. Laser-template processing is a manufacturing process that uses a laser to produce microstructure molds on silicon, glass, polymer, and other substrates, and then uses soft lithography technology to reverse die the structures on the molds. Based on the interaction between the laser and materials, the induction, removal, and migration of materials to be processed can be realized. By adjusting the laser processing mode and processing parameters, the controlled manufacturing of the 2D or 3D microstructures or the controlled preparation of functional materials for the sensitive units can be realized, breaking through the limitations of efficiency and cost of traditional manufacturing methods for microstructures. In this paper, the types, functions, and manufacturing technologies of microstructures are summarized and classified. The preparation processes of laser manufacturing technology and other advanced manufacturing technologies of microstructures are summarized. The applications of microstructure sensors prepared by laser ablation, laser direct writing, laser induction, and laser-template processing technology in bioelectric sensing, temperature sensing, and pressure sensing are described in detail. Finally, the development trend of the laser manufacturing technology for microstructure sensors is summarized and prospected.