超表面是一种周期性亚波长人工结构薄层，其与入射电磁波共振耦合所引入的相位突变打破了传统光学对空间光程累计的依赖，表现出独特的电磁学特性。过去10年来，超表面以其优于传统光学元件的超薄厚度、超短调制距离和超高分辨率光波操纵能力受到研究者们的广泛关注。并且作为超材料的二维对应物，超表面更易于被制造和集成到器件中，可以工作在微波到可见光波长范围内。常用于超表面的制造工艺包括紫外光刻、电子束光刻、聚焦离子束光刻和纳米压印等，但超表面的大规模应用仍面临加工精度与大面积、大规模制造和加工成本之间的矛盾。基于飞秒脉冲激光和双光子聚合反应的双光子三维（3D）打印技术可以实现高精度、复杂3D模型和无掩膜的一步制造，具有加工便捷和灵活的优点，以及大面积制造的潜力，被广泛应用于超表面结构研究与制备。文章对基于双光子3D打印技术制备的超表面光器件的近期研究工作进行了综述。文章首先概述了超表面的概念、优势及加工方法，然后介绍了双光子3D打印技术的原理、发展历程和工艺优势，随后分类综述和讨论了表面等离激元超表面、超透镜、超表面纳米显示与图像处理和与光纤端面集成超表面的近期研究工作，最后对基于双光子3D打印技术的超表面光器件进行了评论与展望。

Overview: Femtosecond laser two-photon polymerization (TPP) micro-nanofabrication technology is a new type of three-dimensional lithography technology that integrates nonlinear optics, ultra-fast pulsed laser, microscopic imaging, ultra-high-precision positioning, three-dimensional (3D) graphics CAD modeling, and photochemical materials. It has the characteristics of simplicity, low cost, high resolution, true 3D, and so on. Different from the technical route of shortening the wavelength of the traditional lithography, this TPP technology breaks through the optical diffraction limit using the ultrafast laser in the near-infrared and the nonlinear optical effect of the interaction between the laser and the material. TPP can achieve true 3D fabrication of complex 3D structures. After the femtosecond pulse laser is tightly focused in space, photopolymerization is initiated by the two-photon absorption(TPA), which can limit the fabrication area in the center of the focus. The interaction time of the ultrashort pulse with the material is much lower than the thermal relaxation of the material, avoiding the photothermal effect. The lateral linewidth can be reduced to about 100 nm due to the strong threshold characteristics of the two-photon absorption process. Thus, TPP is an ideal fabrication method in the field of 3D micro-nanostructure. Since 2001, Kawata’s team has used a near-infrared femtosecond laser with a wavelength of 780 nm to fabricate a "nanobull" with the size of red blood cells. It fully demonstrated the advantages of TPP in the preparation of three-dimensional micro-nano structures. At the same time, a polymer nanodot with a size of 120 nm was fabricated, which was only 1/7 of the laser wavelength, breaking the optical diffraction limit in this study. Since then, scientists from various countries have improved the line width, resolution, and other parameters of 3D structure by continuously improving the materials, structure, processing technology and light field control, and other aspects. At the same time, with the continuous development and improvement of the 3D nanostructure fabrication technology, the advantages of TPP technology are also reflected in some application fields, such as micro-optical devices, integrated optical devices, micro-electromechanical systems, and biomedical devices. This paper will systematically introduce the femtosecond laser TPP micro-nanofabrication technology, including the fabricating principle, the development of fabricating methods, and its research overview in many application fields. Finally, its existing problems and future development and application prospects are discussed.

针对目前微纳针形结构加工中存在的精度、形貌、可控性等问题，基于飞秒激光双光子加工系统中的单个体素，通过引入一维倾角自动调控体素的空间位置，提出了一种简单高效的加工连续渐变微纳针形结构的方法。通过开展加工实验，成功地在光刻胶材料中加工出了一系列长度可控、形貌连续渐变的微纳针形结构。实验结果表明：基于本方法加工的微纳针形结构，其高度呈线性变化关系且针尖形貌渐变精度达到了纳米量级，结构横向线宽渐变连续且沿中轴线呈对称分布；针形结构顶端最小高度达到5 nm，横向最小线宽为195 nm。其在功能表面、微纳流控、生物传感等研究领域具有潜在的应用价值。

集成光子芯片是将激光光源、低损耗波导、调制器、探测器等多类光电器件结合在一起，实现功能化集成，在高速光通讯、量子信息处理、光学传感等领域有具有重要的应用。然而由于不同的光电器件基于不同材料体系，实现多材料体系的光电器件集成极其困难。传统的异质集成和单片集成方法难以同时解决定位精度不足、低拓展性、高损耗、低带宽等一系列问题。基于飞秒激光的双光子聚合技术具有高精度和高穿透的优势，可以实现多材料体系的片上微纳光学元件增材制造，具有极高的加工自由度。本文对片上光学元件的激光增材制造这一领域进行综述，探讨了光子引线键合和微空间光路元件两种技术路径，总结了现有技术的发展现状，并对未来的发展前景进行了展望。