王虎 1,2何渝 1,*
作者单位
摘要
1 中国科学院光电技术研究所,四川 成都 610209
2 中国科学院大学, 北京 100049
斜面和曲面微结构元件在微电子学、微光学、微流体学等领域有着重要的应用,为了实现快速、低成本的斜面和曲面光刻,提出了利用基于液晶空间光调制器的纯相位计算全息技术投影目标图案到斜面和曲面进行曝光的方法。生成了斜面和球面全息光场,对光场进行消散斑和杂散光去除的处理,完成了斜面和球面光刻实验验证。实验结果表明:该方法加工效率高、设计灵活多变,不受单一结构限制,是一种极具潜力的三维微纳加工方法。
计算全息 曲面投影 光刻 computer generated holography curved surfaces projection optical lithography 
红外与激光工程
2022, 51(11): 20220136
作者单位
摘要
1 中国科学院 电工研究所,北京0090
2 中国科学院大学,北京100049
曝光工艺中经离心涂敷后抗蚀剂胶层的均匀性对曝光线宽有很大的影响。为了得到高速旋转下抗蚀剂胶体在凹面衬底上所形成膜层厚度的均匀性,在凹面衬底上建立了非牛顿流体微元经离心旋转的流体动力学模型。根据对应的边界条件、非牛顿流体的本构方程和连续性方程,推导并得到了流体性质、曲面面形、旋转速度和时间等因素与最终厚度的关系式。使用流变仪对950 K PMMA C 2%抗蚀剂的流体性质进行标定,在凹面衬底上以旋转速度为单一变量进行离心涂胶实验,使用光谱椭圆偏振仪测量离心后随矢量半径变化的胶体厚度,并与理论推导进行对比。实验结果表明:旋转速度在2 000 r/min时,理论厚度为267 nm,实验所测厚度为230 nm,偏差比率为13.86%;旋转速度在3 000 r/min时,理论厚度为178 nm,实验所测厚度为172 nm,偏差比率为3.37%。考虑到涂胶后,前烘工艺会进一步减小胶层厚度,偏差在正常范围内。本文建立的数学模型具有较好的预见性,可以对胶体经旋转离心后的均匀性提供理论指导。
电子束曝光 离心涂胶 非牛顿流体 胶层厚度 曲面 electron beam lithography spin-coating non-Newtonian fluid layer thickness curved surfaces 
光学 精密工程
2022, 30(1): 71
Author Affiliations
Abstract
1 Department of Engineering Science and Mechanics, The Pennsylvania State University, Pennsylvania, PA 16802, United States of America
2 James Watt School of Engineering, University of Glasgow, G12 8QQ Glasgow, United Kingdom
3 State Key Laboratory of Advanced Welding & Joining, Flexible Printed Electronics Technology Center, Harbin Institute of Technology, Shenzhen 518055, People’s Republic of China
4 Department of Mechanical Engineering Technology, Pennsylvania State University-Erie, The Behrend College, Erie, PA 16563, United States of America
5 Department of Materials Science and Engineering, The Pennsylvania State University, Pennsylvania, PA 16802, United States of America
6 Department of Mechanical Engineering, The Pennsylvania State University, Pennsylvania, PA 16802, United States of America
7 Department of Biomedical Engineering, The Pennsylvania State University, Pennsylvania, PA 16802, United States of America
Health monitoring of structures and people requires the integration of sensors and devices on various 3D curvilinear, hierarchically structured, and even dynamically changing surfaces. Therefore, it is highly desirable to explore conformal manufacturing techniques to fabricate and integrate soft deformable devices on complex 3D curvilinear surfaces. Although planar fabrication methods are not directly suitable to manufacture conformal devices on 3D curvilinear surfaces, they can be combined with stretchable structures and the use of transfer printing or assembly methods to enable the device integration on 3D surfaces. Combined with functional nanomaterials, various direct printing and writing methods have also been developed to fabricate conformal electronics on curved surfaces with intimate contact even over a large area. After a brief summary of the recent advancement of the recent conformal manufacturing techniques, we also discuss the challenges and potential opportunities for future development in this burgeoning field of conformal electronics on complex 3D surfaces.
conformal manufacturing soft deformable sensors curved surfaces transfer printing direct printing and writing methods 
International Journal of Extreme Manufacturing
2021, 3(4): 042001
作者单位
摘要
华中理工大学激光技术国家重点实验室,武汉 430074
通过亥姆霍兹方程研究了双弯曲截面柔性波导的本征模式;运用光学方法计算了波导的传输效率。制作出双弯曲截面柔性波导。进行了激光传输实验,并成功地传输了1040 W CO2激光。
高功率 激光 双弯曲 波导 high power laser two curved surfaces waveguide 
中国激光
1998, 25(1): 51

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