Author Affiliations
Abstract
1 School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
2 Dynax Semiconductor Inc., Suzhou 215300, China
3 Department of Micro- and Nanoelectronics, Saint Petersburg Electrotechnical University, Saint Petersburg 197376, Russia
A physics-based analytical expression that predicts the charge, electrical field and potential distributions along the gated region of the GaN HEMT channel has been developed. Unlike the gradual channel approximation (GCA), the proposed model considers the non-uniform variation of the concentration under the gated region as a function of terminal applied voltages. In addition, the model can capture the influence of mobility and channel temperature on the charge distribution trend. The comparison with the hydrodynamic (HD) numerical simulation showed a high agreement of the proposed model with numerical data for different bias conditions considering the self-heating and quantization of the electron concentration. The analytical nature of the model allows us to reduce the computational and time cost of the simulation. Also, it can be used as a core expression to develop a complete physics-based transistor Ⅳ model without GCA limitation.
AlGaN/GaN (HEMTs) 2DEG charge distribution electron mobility hydrodynamic model channel temperature 
Journal of Semiconductors
2023, 44(8): 082802
Author Affiliations
Abstract
1 State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
2 Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, CAS, Suzhou 215123, China
3 Institute of Electronic and Information Engineering, University of Electronic Science and Technology of China, Dongguan 523808, China
In this work, the GaN p-MISFET with LPCVD-SiNx is studied as a gate dielectric to improve device performance. By changing the Si/N stoichiometry of SiNx, it is found that the channel hole mobility can be effectively enhanced with Si-rich SiNx gate dielectric, which leads to a respectably improved drive current of GaN p-FET. The record high channel mobility of 19.4 cm2/(V?s) was achieved in the device featuring an Enhancement-mode channel. Benefiting from the significantly improved channel mobility, the fabricated E-mode GaN p-MISFET is capable of delivering a decent-high current of 1.6 mA/mm, while simultaneously featuring a negative threshold-voltage (VTH) of –2.3 V (defining at a stringent criteria of 10 μA/mm). The device also exhibits a well pinch-off at 0 V with low leakage current of 1 nA/mm. This suggests that a decent E-mode operation of the fabricated p-FET is obtained. In addition, the VTH shows excellent stability, while the threshold-voltage hysteresis ΔVTH is as small as 0.1 V for a gate voltage swing up to –10 V, which is among the best results reported in the literature. The results indicate that optimizing the Si/N stoichiometry of LPCVD-SiNx is a promising approach to improve the device performance of GaN p-MISFET.
p-channel GaN p-FET LPCVD channel mobility hole mobility enhancement-mode 
Journal of Semiconductors
2023, 44(8): 082801
作者单位
摘要
电子科技大学 物理学院, 成都 611731
采用综合考虑温度、电场强度、载流子浓度的普遍迁移率模型, 利用实际太阳能光谱和非富勒烯材料的吸收系数来计算载流子的产生, 结合漂移扩散方程、电流连续性方程等对高效率有机太阳电池进行理论建模。利用该模型计算了器件的电流-电压曲线、开路电压-光照强度曲线和短路电流-光照强度曲线。结果发现, 利用该模型计算的电流-电压曲线与实验数据符合很好, 其他两种曲线也与实验数据符合较好。此外, 利用该模型分析了能量无序度对器件性能的影响, 结果表明减小材料的能量无序度可以提高有机太阳电池的性能。
迁移率 非富勒烯 有机太阳电池 理论建模 能量无序度 mobility non-fullerene organic solar cells theoretical modeling energy disorder 
半导体光电
2023, 44(2): 204
陈晓娟 1,2,*张一川 2张昇 2李艳奎 2[ ... ]魏珂 2,**
作者单位
摘要
1 西安电子科技大学,陕西 西安 710071
2 中国科学院微电子研究所,北京 100029
本文采用金属有机化学气相沉积(MOCVD)生长原位SiNx栅介质制备了用于Ka波段高功率毫米波应用的AlN/GaN金属绝缘体半导体高电子迁移率晶体管(MIS-HEMTs)。原位生长SiNx栅介质显著抑制了栅反向漏电、栅介质/AlN界面态密度和电流坍塌。所研制的MIS HEMTs在VGS= 2 V时最大饱和输出电流为2.2 A/mm,峰值跨导为509 mS/mm,在VGS = -30 V时肖特基栅漏电流为4.7×10-6 A/mm。采用0.15 μmT形栅技术,获得98 GHz的fT和165 GHz的fMAX。大信号测量表明,在连续波模式下,漏极电压VDS = 8 V时,MIS HEMT在40 GHz下输出功率密度2.3 W/mm,45.2%的功率附加效率(PAE),而当VDS增加到15 V时,功率密度提升到5.2 W/mm,PAE为42.2%。
AlN/GaN 金属绝缘体半导体高电子迁移率晶体管 Ka波段 低损耗 低偏压 AlN/GaN metal-insulator-semiconductor High Electron Mobility Transistors(MIS-HEMTs) millimeter wave low dispersion low drain voltage 
红外与毫米波学报
2023, 42(4): 483
陈晓娟 1,2,*张昇 2张一川 2李艳奎 2[ ... ]魏珂 2,**
作者单位
摘要
1 西安电子科技大学,陕西 西安 710071
2 中国科学院微电子研究所,北京 100029
本文采用等离子体增强原子层沉积(PEALD)生长的SiNx栅介质制备了宽带应用的AlGaN/GaN金属绝缘体半导体高电子迁移率晶体管(MIS-HEMTs),并在直流、小信号及大信号测试中评估了该介质层对器件性能的提升。测试结果表明改进器件具有高质量界面、宽栅极控制范围、良好的电流崩塌控制等优势,并确认了其在超过5 GHz下工作时仍能保持较高的功率附加效率(PAE)。在5 GHz连续波模式下,漏极电压VDS = 10 V时,MIS HEMT输出功率密度为1.4 W/mm,PAE可达到74.7%;VDS增加到30 V时,功率密度提升到5.9 W/mm,PAE可保持在63.2%的水平;测试频率增加30 GHz,在相同的输出功率水平下,器件的PAE达到50.4%。同时,高质量栅极介电层还可允许器件承受高的栅极电压摆动:在功率增益压缩6 dB时,栅极电流保持在10-4 A/mm。上述结果证实了该SiNx栅介质对器件性能的提升,使其满足宽带应用的高效率、高功率和可靠性要求,为系统和电路的宽带设计提供器件级的保障。
MIS-HEMTs SiNx栅介质 功率附加效率 栅压摆幅 宽带 metal-insulator-semiconductor High Electron Mobility Transistors (MIS-HEMTs) power added efficiency (PAE) broadband compressed gain gate voltage swing 
红外与毫米波学报
2023, 42(3): 339
Rongkai Lu 1Siqin Li 1Jianguo Lu 1,2,*Bojing Lu 1[ ... ]Zhizhen Ye 1,2,***
Author Affiliations
Abstract
1 State Key Laboratory of Silicon Materials, Key Laboratory for Biomedical Engineering of Ministry of Education, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
2 Wenzhou Key Laboratory of Novel Optoelectronic and Nano Materials, Institute of Wenzhou, Zhejiang University, Wenzhou 325006, China
3 Department of Electronic Science and Technology, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
4 Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
Amorphous oxide semiconductors (AOS) have unique advantages in transparent and flexible thin film transistors (TFTs) applications, compared to low-temperature polycrystalline-Si (LTPS). However, intrinsic AOS TFTs are difficult to obtain field-effect mobility (μFE) higher than LTPS (100 cm2/(V·s)). Here, we design ZnAlSnO (ZATO) homojunction structure TFTs to obtainμFE = 113.8 cm2/(V·s). The device demonstrates optimized comprehensive electrical properties with an off-current of about 1.5 × 10–11 A, a threshold voltage of –1.71 V, and a subthreshold swing of 0.372 V/dec. There are two kinds of gradient coupled in the homojunction active layer, which are micro-crystallization and carrier suppressor concentration gradient distribution so that the device can reduce off-current and shift the threshold voltage positively while maintaining high field-effect mobility. Our research in the homojunction active layer points to a promising direction for obtaining excellent-performance AOS TFTs.
thin film transistors homojunction carrier mobility amorphous oxides 
Journal of Semiconductors
2023, 44(5): 052101
作者单位
摘要
沈阳工业大学材料科学与工程学院, 沈阳 110870
利用高真空磁控溅射技术, 通过高纯Mg靶和自制Mg-Bi-Sn合金靶的顺序溅射沉积, 制备了Mg3Bi2/Mg2Sn纳米复合薄膜。沉积薄膜的晶体结构和相组成由X射线衍射(XRD)图谱确定, 表面形貌和化学成分用场发射扫描电子显微镜(FESEM)和能谱仪(EDS)进行观察、测量和分析。沉积薄膜的载流子浓度和迁移率通过霍尔实验获得, 电导率和Seebeck系数由Seebeck/电阻测试分析系统进行测量。结果表明, 沉积薄膜由Mg3Bi2和Mg2Sn两相组成, 随着薄膜中Mg2Sn含量的增加, 沉积薄膜的室温载流子浓度增加而迁移率下降。在整个测试温度范围内, 随薄膜中Mg2Sn含量的增加, 薄膜Seebeck系数不断升高而电导率下降。Mg2Sn相原子含量为28.22%的沉积薄膜在155 ℃获得最高功率因子为1.2 mW·m-1·K-2。在Mg3Bi2薄膜中加入适量的Mg2Sn第二相, 可明显提升Mg3Bi2薄膜材料的功率因子。
热电材料 Mg3Bi2/Mg2Sn纳米复合膜 Seebeck系数 相界面 载流子浓度 迁移率 电导率 thermoelectric material Mg3Bi2/Mg2Sn nanocomposite film Seebeck coefficient phase interface carrier concentration mobility conductivity 
人工晶体学报
2023, 52(3): 467
作者单位
摘要
1 北京大学 物理学院,人工微结构和介观物理国家重点实验室,北京 100871
2 泰山学院 物理与电子工程学院,山东 泰安 271000
有机电致发光(OLED)是目前最有竞争力的显示技术,市场占有量逐年攀升。高效、稳定的OLED,特别是深蓝光器件,性能仍需提升,其关键问题是高性能的电子传输材料的研发。这是由于有机分子难以获得较高电子迁移率,器件中的复合区域通常靠近电子传输层一侧,这就要求电子传输材料需要具有较高三线态能级来限域激子,尤其是高能量的蓝光激子。而高三线态(弱共轭)和高迁移率(强共轭)一直是有机分子设计中难以调和的矛盾,此外更宽的带隙也会导致较差的热稳定性,这些难题始终限制着OLED电子传输材料的发展。本文分类介绍了高性能的电子传输材料所需要具备的几点特性,包括热稳定性、光化学稳定性、电子迁移率、前线轨道能级和三重态能级等,并且综述了21世纪以来OLED小分子电子传输材料的重要研究进展,以期对未来开发理想的电子传输材料提供参考。
有机电致发光 电子传输材料 稳定性 电子迁移率 三重态能级 organic light-emitting diodes electronic transport materials stability electron mobility triplet energy 
发光学报
2023, 44(1): 26
作者单位
摘要
1 哈尔滨理工大学 电气与电子工程学院,黑龙江 哈尔滨 150080
2 中国科学院上海技术物理研究所 传感技术国家重点实验室,上海 200083
3 中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083
研究了分子束外延生长条件对高铟组分InGaAs材料性能的影响,分析了生长温度、V/III比和As分子束形态对In0.74Ga0.26As材料光致发光和X射线衍射峰强度、本底载流子浓度和迁移率的影响。测试结果表明:适中的生长温度和V/III比可以提高材料晶格质量,减少非辐射复合,降低本底杂质浓度。As分子束为As2时In0.74Ga0.26As材料质量优于As4分子束。当生长温度为570 ℃,As分子束形态为As2,V/III比为18时,可以获得较高的光致发光和X射线衍射峰强度,室温和77 K下的本底载流子浓度分别达到6.3×1014 cm-3和4.0×1014 cm-3,迁移率分别达到13 400 cm2/Vs和45 160 cm2/Vs。
InGaAs 高铟组分 短波红外 分子束外延 迁移率 InGaAs high indium composition short-wave infrared molecular beam epitaxy(MBE) mobility 
红外与毫米波学报
2022, 41(6): 987
作者单位
摘要
1 中国电子科技集团公司第十三研究所,河北 石家庄 050051
2 华东师范大学 物理与电子科学学院,上海 200241
基于90 nm InP HEMT工艺,设计了一款220 GHz功率放大器太赫兹单片集成电路,该放大器采用片上威尔金森功分器结构实现了两路五级共源放大器的功率合成。在片测试结果表明,200~230 GHz频率范围内,功率放大器小信号增益平均值18 dB。频率为210~230 GHz范围内该MMIC放大器饱和输出功率优于15.8 mW,在223 GHz时最高输出功率达到20.9 mW,放大器芯片尺寸为2.18 mm×2.40 mm。
铟磷高电子迁移率晶体管(InP HEMT) 功率放大器(PA) 太赫兹集成电路(TMIC) InP high electron mobility transistor(InP HEMT) power amplifier(PA) terahertz integrated circuit(TMIC) 
红外与毫米波学报
2022, 41(6): 1037

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!