以半导体激光为光源,建立了一个可以实时测量空气中尘埃粒子的尺寸与颗粒数浓度的光学系统.根据Mie散射理论,计算了该光学系统的光散射响应特性.实验结果表明,该系统具有高的计数准确度、计数效率和计数重复性,适用于洁净度检测和环境空气中尘埃粒子的粒径分布测量.

A laser-diode based optical system which can measure aerosol particle size and concentration is described in this paper. The light scattering response characteristics of the system are calculated based on Mie light scattering theory. Some experimental results show that the system has high counting accuracy, efficiency and reproducibility, and suitable for verification of cleanliness class and measurement of ambient aerosol size distribution.