红外与毫米波学报, 2003, 22 (4): 269, 网络出版: 2006-05-10
化学溶液分解法制备LaNiO3薄膜的研究
STUDY ON THE PREPARATION OF LaNiO3 THIN FILMS USING CHEMICAL SOLUTION DECOMPOSITION METHOD
摘要
采用化学溶液分解法直接在单晶Si(100)衬底上制备了LaNiO3薄膜,研究了不同热处理气氛(空气和氧气)对薄膜的结晶性、晶粒尺寸、电阻率以及其上面生长的锆钛酸铅(PZT)薄膜的影响.结果发现二种气氛得到的LaNiO3薄膜的电阻率相差较大,其中在氧气中制备的薄膜电阻率仅为在空气中得到的1/2.对LaNiO3薄膜的导电机制进行了讨论.
Abstract
LaNiO 3 thin films on Si(100) substrates were prepared using chemical solution decomposition method (CSD). The effects of annealing atmosphere (air and oxygen) on the crystallinity, grain size and resistivity of LaNiO 3 thin films, and the PZT films grown on the LNO layers were studied. The results showed that the value of the resistivity of the LaNiO 3 thin films annealed in oxygen is only half of that obtained in air. The conductive mechanism of LaNiO 3 thin films was discussed.
李亚巍, 孟祥建, 于剑, 王根水, 孙璟兰, 褚君浩, 张伟风. 化学溶液分解法制备LaNiO3薄膜的研究[J]. 红外与毫米波学报, 2003, 22(4): 269. 李亚巍, 孟祥建, 于剑, 王根水, 孙璟兰, 褚君浩, 张伟风. STUDY ON THE PREPARATION OF LaNiO3 THIN FILMS USING CHEMICAL SOLUTION DECOMPOSITION METHOD[J]. Journal of Infrared and Millimeter Waves, 2003, 22(4): 269.
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