Chinese Optics Letters, 2003, 1 (9): 09529, Published Online: Jun. 6, 2006
1.55-μm Si-based MOEMS optical tunable filter 
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350.2460 filters interference 220.4000 microstructure fabrication 130.3120 integrated optics devices
Abstract
A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.
Yuhua Zuo, Changjun Huang, Buwen Cheng, Xiao Cai, Rongwei Mao, Chuanbo Li, Liping Luo, Junhua Gao, Yunxia Bai, Lei Jiang, Chaohua Ma, Jialian Zhu, Liangchen Wang, Jinzhong Yu, Qiming Wang. 1.55-μm Si-based MOEMS optical tunable filter[J]. Chinese Optics Letters, 2003, 1(9): 09529.
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