激光技术, 2006, 30 (1): 0076, 网络出版: 2010-06-03
1．06μm连续激光辐照TiO2／SiO2薄膜元件的损伤效应研究
Research on damage of TiO2/SiO2 film induced-by 1.06μm CW laser
摘要
用1．06μm连续激光辐照TiO2／SiO2薄膜元件，在不同强度下测量了激光辐照TiO2／SiO2薄膜元件引起反射信号幅度随时间的变化，并观察到薄膜从基体材料表面起泡、膜层脱落的现象。研究结果表明，TiO2／SiO2薄膜的反射光信号变化是连续激光辐照薄膜元件产生的热效应引起的；在激光辐照过程中，薄膜元件基体材料产生的热变形差别是基体起泡、脱落的主要原因。
Abstract
When TiO2/SiO2 film is irradiated by difterent 1.06μm CW-Nd∶YAG laser radiation,the time history of the signal reflected from the TiO2/SiO2 film is measured till a number of foam and pull-off phenomenon on the TiO2/SiO2 film surface is observed. The test results indicate the variation of the reflected signal is caused by thermal effect due to laser irradiation and during the laser irradiation,the difference of thermal deformation of the TiO2/SiO2 film and substrate is the main cause of the foam and pull-off phenomenon.
周维军, 袁永华, 张大勇, 桂元珍, 江继军. 1．06μm连续激光辐照TiO2／SiO2薄膜元件的损伤效应研究[J]. 激光技术, 2006, 30(1): 0076. ZHOU Wei-yun, YUAN Yong-hua, ZHANG Da-yong, GUI Yuan-zhen, JIANG Ji-jun. Research on damage of TiO2/SiO2 film induced-by 1.06μm CW laser[J]. Laser Technology, 2006, 30(1): 0076.
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