Chinese Optics Letters, 2008, 6 (4): 310, Published Online: Apr. 21, 2008   

Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region Download: 513次

Author Affiliations
Institute of Precision Optical Engineering, Tongji University, Shanghai 200092
Abstract
The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics. Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror. The normal incidence reflectivity and chirp in the wavelength range of 12.5-16.5 nm are 6.7%+-0.5% and -3617+-171 as2, respectively. Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses.

Rui Chen, Fengli Wang. Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region[J]. Chinese Optics Letters, 2008, 6(4): 310.

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