中国激光, 2009, 36 (s2): 35, 网络出版: 2009-12-30
一种基于移动掩模光刻制作四棱锥反射镜的方法
A Pyramidal Mirror Fabricated by Moving Mask Lithography Method
光学器件 四棱锥反射镜 反射式棱锥波前传感器 移动掩模光刻 optical device pyramidal mirror reflective pyramid wavefront sensor mask moving lithography
摘要
提出了基于微细加工的移动掩模光刻(MML)法制作四棱锥反射镜的方法。通过移动掩模光刻,在光刻胶上得到棱锥结构,然后将其线性传递到硅基底上,进行金属化处理以提高反射率。棱锥结构的底面尺寸为1 mm×1 mm,四个反射面与底面成3.7°的倾角。尖端和棱边的尺寸被控制在6 μm左右,呈现出非常好的刀口状,镜面粗糙度的均方根误差(RMS)为77 nm,均满足红外波段的波前传感系统的要求。
Abstract
A new manufacturing method for the pyramid sensor using mask moving lithography (MML) process is proposed. Firstly,there is one time moving mask exposure in both two orthogonal directions,and then a pyramidal structure is formed in the photoresist after development. Secondly,the structure will be transferred into the substrate of silicon. Lastly,metallization is carried out to increase the reflectivity of the pyramidal mirror. The completed pyramidal mirror has a square base of 1 mm length and mirror-like for side-facets inclined to the base at 3.7° with knife edges and sharpening tip. The sizes of pyramid tip and turned edges are both at about 6 μm ,and the root mean square (RMS) of the four mirror-like facets is approximately 77 nm.
王爱娜, 姚军, 蔡冬梅, 潘丽, 李飞. 一种基于移动掩模光刻制作四棱锥反射镜的方法[J]. 中国激光, 2009, 36(s2): 35. Wang Aina, Yao Jun, Cai Dongmei, Pan Li, Li Fei. A Pyramidal Mirror Fabricated by Moving Mask Lithography Method[J]. Chinese Journal of Lasers, 2009, 36(s2): 35.
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