强激光与粒子束, 2009, 21 (11): 1681, 网络出版: 2010-02-28
周期多层膜Kirkpatrick-Baez显微镜成像性质分析
Imaging characteristic analysis of Kirkpatrick-Baez microscope with periodic multilayer
Kirkpatrick-Baez显微镜 X射线成像 周期多层膜 像质 Kirkpatrick-Baez microscope X-ray imaging periodic multilayer imaging characteristic
摘要
分析了Kirkpatrick-Baez(KB)显微镜的成像性质与周期多层膜元件间的关系。基于分辨力和集光效率要求,设计了KB显微镜的光学结构,模拟了KB系统的成像质量,用W/B4C周期多层膜反射镜进行了X射线成像实验,在±100 μm视场内得到优于5 μm的空间分辨力结果。实验与模拟结果的对比表明,加工精度和球差是影响中心视场分辨力的关键因素,有效视场的大小受多层膜角度带宽的限制。
Abstract
Relation between imaging characteristic of Kirkpatrick-Baez(KB) microscope and periodic multilayer films is analyzed. The optical structure of KB microscope is designed based on resolution and collection efficiency requirements. Imaging quality is simulated,and 8 keV X-ray imaging experiment by KB microscope with W/B4C periodic multilayer is performed,the resolution is about 2 μm in central field and better than 5 μm in ±100 μm field. The result comparison between simulation and experiment shows spherical aberration and mirror machining precision are the key factors influencing the resolution of central field,and the range of effective field of view is limited by angle bandwidth of periodic multilayer.
伊圣振, 穆宝忠, 王新, 黄圣铃, 朱京涛, 王占山, 丁永坤, 缪文勇, 董建军. 周期多层膜Kirkpatrick-Baez显微镜成像性质分析[J]. 强激光与粒子束, 2009, 21(11): 1681. Yi Shengzhen, Mu Baozhong, Wang Xin, Huang Shengling, Zhu Jingtao, Wang Zhanshan, Ding Yongkun, Miao wenyong, Dong jianjun. Imaging characteristic analysis of Kirkpatrick-Baez microscope with periodic multilayer[J]. High Power Laser and Particle Beams, 2009, 21(11): 1681.
PDF全文
