介绍一种复合光路宽光谱膜厚监控系统及其软硬件开发,对系统结构组成和工作原理进行说明。通过增加中间通光孔式的分光镜的复合光路,基于LabVIEW平台开发宽光谱膜厚监控软件,实现了基于宽光谱扫描法的宽光谱膜厚监控和基于极值法的光学膜厚监控的兼容并用,提高了光学镀膜膜厚监控的精确性和自动化,为传统光学镀膜设备的升级改造提出了一种可行性技术。

A wide-band spectrum optical film thickness monitoring system with compound light path is introduced. The structure,components and working principles of the system are analyzed. The monitoring system is developed by increasing a piece of spectroscope with aperture to form compound light path,and wide-band spectrum monitoring software based on LabVIEW. Methods of wide-band spectrum optical film thickness monitoring based spectrum scanning method and optical film thickness monitoring based on extremum method are compatible. The accuracy and automatization of optical film thickness monitoring can be improved also. This monitoring system can be used in upgrade or reconstruction of optical coating devices.