光子学报, 2009, 38 (12): 3052, 网络出版: 2010-05-10   

热物性参量对飞秒激光烧蚀金属影响的分子动力学模拟

Influence of Thermophysical Parameters by Femtosecond Laser Ablation of Metals:Molecular Dynamics Simulation
作者单位
1 南华大学 电气工程学院,湖南 衡阳 421001
2 华中科技大学光电子科学与工程学院 武汉光电国家实验室,武汉 430074
摘要
利用结合双温模型的分子动力学模拟方法,研究了飞秒激光与金属相互作用的烧蚀机制.采用中心波长为800 nm,能量密度从0.043 J·cm-2到0.40 J·cm-2不等,脉宽分别为70 fs和200 fs的激光烧蚀金属镍和铝材料.靶材的温度、原子位型以及内部压力随时间的演化展示了材料热物性参量特性和激光参量对烧蚀结果的影响.结果显示材料电子热传导率对飞秒脉宽激光下的影响仍然较大; 对比铝和镍的结果可知,铝的电子晶格耦合系数比镍的小,故电子晶格间的温度梯度持续时间较长; 铝的电子热传导系数比镍的大,所以材料上下表面电子温度耦合的时间缩短.铝薄膜表面在能量密度为0.40 J·cm-2激光烧蚀下呈现纳米尺寸的晶体结构.
Abstract
The mechanisms of femtosecond (fs) laser ablating nickel (Ni) and aluminum (Al) are investigated by molecular dynamics simulations combined with two-temperature model.The central wavelength of 800 nm,pulse durations of 70 fs or 200 fs and energy fluence from 0.043 J·cm-2 to 0.40 J·cm-2 are considered in the simulation respectively.The evolutions of temperature,atomic configuration and pressure distribution in the target materials reveal the influences of thermophysical parameters and laser parameters on ablation process.The results show that the electronic thermo-conductivity still has great influence on laser-metals interaction under femtosecond time-scale.Comparing the results of fs laser ablating Ni and Al,the nonequilibrium between the electron and lattice temperature of Al continued for a longer time as the electron-lattice coupling constant of Al is much smaller than that of Ni.The balance time for surface and bottom electronic temperature of Al became shorter as the electronic thermal conductivity of Al is much larger than that of Ni.Nanocrystal structures appeare on the surface of Al film ablated with laser fluence of 0.4 J·cm-2.

王新林, 吴鹤, 常彦晓, 朱卫华, 陈志勇, 陆培祥. 热物性参量对飞秒激光烧蚀金属影响的分子动力学模拟[J]. 光子学报, 2009, 38(12): 3052. WANG Xin-lin, WU He, CHANG Yan-xiao, ZHU Wei-hua, CHEN Zhi-yong, LU Pei-xiang. Influence of Thermophysical Parameters by Femtosecond Laser Ablation of Metals:Molecular Dynamics Simulation[J]. ACTA PHOTONICA SINICA, 2009, 38(12): 3052.

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