光学与光电技术, 2010, 8 (4): 68, 网络出版: 2010-12-07
CO2激光预处理对熔石英表面影响的实验研究
Experiment Research on Influence of CO2 Laser Repairing on Fused Silica Surface
CO2激光预处理 熔石英 局部粗糙度 损伤阈值 损伤修复 CO2 laser conditioning fused silica local roughness damage threshold damage mitigation
摘要
为研究CO2激光预处理参数对熔石英基片表面的影响,采用波长为10.6 μm,重复频率为100 Hz的CO2激光对完好的熔石英基片进行单点单次辐照处理。实验发现,对于不同的修复程度,面形变化不完全相同,损伤斑的形貌也各不相同。实验得到了适合修复的参数范围,并研究了修复对于材料粗糙度和疏水性的影响。对中度修复的取样点表面的局部粗糙度进行了统计,发现预处理过程中的污染沉积物在一定范围存在。在此基础上对污染的影响范围分布规律进行了统计。
Abstract
A CO2 laser operated at 10.6 μm and 100 Hz is used for single-pulse local irradiation of fused silica substrate. The repair degree is classified according to the different damage behavior and surface quality. The results show that the moderate repair is feasible for damage growth repair. Effects on roughness and hydrophobic preformance of the modified material are investigated. The influence of repair parameters on distribution of re-deposited debris is analyzed.
李熙斌, 吕海兵, 向霞, 王海军, 陈猛, 黄进, 袁晓东, 郑万国. CO2激光预处理对熔石英表面影响的实验研究[J]. 光学与光电技术, 2010, 8(4): 68. LI Xi-bin, LV Hai-bing, XIANG Xia, WANG Hai-jun, CHEN Meng, HUANG Jin, YUAN Xiao-dong, ZHENG Wan-guo. Experiment Research on Influence of CO2 Laser Repairing on Fused Silica Surface[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2010, 8(4): 68.
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