红外与毫米波学报, 2009, 28 (2): 90, 网络出版: 2010-12-13
长波红外2048元线列碲镉汞焦平面器件
LONG-WAVE INFRARED 2048-ELEMENTS LINEAR HgCdTe FOCAL PLANE ARRAY
摘要
介绍了长波红外2048元线列碲镉汞焦平面器件的制备技术和达到的性能参数.探测器采用离子注入平面pn 结制备光敏元, 通过间接倒焊技术和读出电路互联, 采用8个256元焦平面模块拼接2048元线列焦平面器件.光敏 元的响应截止波长达到9.9μm, 相应的 R 0 A 达到10Ωcm 2 , 平均峰值探测率达到9.3×10 10 cmHz 1/2 W -1 , 响应不均匀 性为8%, 有效光敏元率大于99.5%.
Abstract
The technology and performance of long-wave 2048-elements linear HgCdTe focal plane array were reported. The n-on-p photodiodes were fabricated by planar ion implantation and hybridized with readout circuit by indirect flip chip technique. The 2048-elements linear array consists of 8 segments of 256-element linear arrays that are “butted” on a single substrate in a staggered format. The cut off wavelength and R 0 A of the photodiode are 9.9μm and 10 Ωcm 2 , respectively. The average detectivity of the 2048-elements linear array is 9.3×10 10 cmHz 1/2 W -1 . The ununiformity of response is 8%. The array peak operability is larger than 99.5%.
李言谨, 杨建荣, 何力, 张勤耀, 丁瑞军, 方维政, 陈新强, 魏彦峰, 巫艳, 陈路, 胡晓宁, 王建新, 倪云芝, 唐红兰, 王正官. 长波红外2048元线列碲镉汞焦平面器件[J]. 红外与毫米波学报, 2009, 28(2): 90. LI Yan-Jin, YANG Jian-Rong, HE Li, ZHANG Qin-Yao, DING Rui-Jun, FANG Wei-Zheng, CHEN Xin-Qiang, WEI Yan-Feng, WU Yan, CHEN Lu, HU Xiao-Ning, WANG Jian-Xin, NI Yun-Zhi, TANG Hong-Lan, WANG Zheng-Guan. LONG-WAVE INFRARED 2048-ELEMENTS LINEAR HgCdTe FOCAL PLANE ARRAY[J]. Journal of Infrared and Millimeter Waves, 2009, 28(2): 90.
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