光学学报, 2011, 31 (2): 0222001, 网络出版: 2011-01-14
离轴二次非球面反射镜无像差点法检测的误差分离技术
Alignment of off-Axis Conic Aspheric Mirrors in Stigmatic Null Test
光学制造 非球面检测 无像差点法检测 调整误差 误差分离矩阵 optical fabrication aspheric testing stigmatic null test alignment error error-separation matrix
摘要
非球面光学元件检测中，获得准确的面形信息是实现元件确定性制造的关键因素之一。在无像差点法检测离轴非球面中，为了实现反射镜的高精度检测，对其干涉检测结果中的误差信息进行了分析。利用偏心光学系统的波像差分析方法，分析了在非球面检测系统中，被测镜的调整误差对系统波像差的影响，建立了调整误差分离的数学模型。利用该模型对离轴非球面反射镜进行实际的调装实验，经过四次调整，被测离轴二次非球面的最终检测的方均根结果为0.037λ (λ=0.6328 μm)，有效地提高了检测效率。
Abstract
During interferometric testing, an accurate evaluation of the surface information is one of the key factors in realizing deterministic manufacturing of off-axis aspheric mirrors. The method used in the analysis of wavefront aberration due to centring error in optical system is valid for test piece misalignment in an interferometric setting as well. The mathematic model of error separation is developed. In experiment, the test result of an off-axis aspheric mirror after alignment is 0.037λ (RMS, λ=0.6328 μm), the test efficiency is improved effectively.
陈钦芳, 李英才, 马臻, 李旭阳, 梁士通. 离轴二次非球面反射镜无像差点法检测的误差分离技术[J]. 光学学报, 2011, 31(2): 0222001. Chen Qinfang, Li Yingcai, Ma Zhen, Li Xuyang, Liang Shitong. Alignment of off-Axis Conic Aspheric Mirrors in Stigmatic Null Test[J]. Acta Optica Sinica, 2011, 31(2): 0222001.
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