光学学报, 2012, 32 (3): 0322001, 网络出版: 2012-03-06
校正低阶像差的9点促动变形镜—设计与实验
A Deformable Mirror with 9 Actuated Points for Low Order Aberration Correction-Design and Experiments
变形镜 连续镜面 像差校正 响应函数 deformable mirror (DM) continuous face-sheet aberration correction influence function
摘要
设计一有效口径为120 mm的连续镜面、分立促动器的变形反射镜并进行了检测实验。以产生离焦、像散和彗差为目标,对变形镜的各项参数进行了优化,优化后的变形镜支撑有9个促动器和3个固定支撑点。固定点用于实现变形镜的定位,促动器用于镜面面形的控制。促动器采用了直线步进电机配合弹簧的结构,将电机的步进位移转换为力,在一定的线性范围内实现高精度的力促动。变形镜的检测设备采用了4D动态干涉仪,经响应函数的确定、校正力的求解和施加以及镜面再检测的步骤后,得到的实验结果表明变形镜能够产生高精度离焦、像散和彗差,且具有较大的动态范围。
Abstract
An effective aperture of 120 mm continuous face-sheet, discrete actuator deformable mirror (DM) is designed and experimentally tested. DM is aimed to correct defocus, astigmatism and coma, and the parameters of the DM are optimized, and it has nine actuated points and three fixed points. The fixed points are used to determine spatial position of the mirror and the actuated points are used to generate desired surface. Actuators are linear step motors with springs on the pushing end, which convert displacement to force. Test instrument used for DM is 4D dynamic interferometer. The test results show that the DM can generate defocus, astigmatism and coma with high accuracy, and it has a large dynamic correcting range.
陈新东, 郑立功, 罗霄, 张学军. 校正低阶像差的9点促动变形镜—设计与实验[J]. 光学学报, 2012, 32(3): 0322001. Chen Xindong, Zheng Ligong, Luo Xiao, Zhang Xuejun. A Deformable Mirror with 9 Actuated Points for Low Order Aberration Correction-Design and Experiments[J]. Acta Optica Sinica, 2012, 32(3): 0322001.