红外与毫米波学报, 2012, 31 (4): 298, 网络出版: 2012-08-31
掺Te的GaSb薄膜分子束外延生长及缺陷特性
Defect of Te-doped GaSb layers grown by molecular beam epitaxy
摘要
分析了非掺GaSb材料及在GaAs衬底上用分子束外延生长掺杂Te的GaSb薄膜材料的缺陷特性,主要应用正电子湮没多谱勒展宽谱方法,并结合原子力显微镜和X射线衍射测试进行.多谱勒展宽谱研究表明,采用分子束外延法生长的掺杂Te的n型半导体GaSb薄膜材料的S参数比体材料小,所得缺陷主要是单空位与间隙原子,而几乎无复合体的缺陷类型.
Abstract
In this paper we present the results of positron annihilation doppler broadening spectroscopy (PADB), X-ray diffraction spectra (XRD), and atomic force microscopy (AFM) measurements on the undoped GaSb and Te-doped GaSb films grown on GaAs substrate by molecular beam epitaxy(MBE). Research shows that the S parameter is smaller in GaSb film than the bulk material. The defects in the Te-doped N-type semiconductor GaSb obtained by MBE are mainly vacancies and impurity atoms instead of complex defects.
陈燕, 邓爱红, 汤宝, 王国伟, 徐应强, 牛智川. 掺Te的GaSb薄膜分子束外延生长及缺陷特性[J]. 红外与毫米波学报, 2012, 31(4): 298. CHEN Yan, DENG Ai-Hong, TANG Bao, WANG Guo-Wei, Xu Ying-Qiang, NIU Zhi-Chuan. Defect of Te-doped GaSb layers grown by molecular beam epitaxy[J]. Journal of Infrared and Millimeter Waves, 2012, 31(4): 298.