光学学报, 2014, 34 (3): 0322003, 网络出版: 2014-02-26   

光学系统计算机辅助装调的坐标基准过渡方法

Coordinate Datum Transition Method for Optical System Computer-Aided Alignment
作者单位
1 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
2 中国科学院大学, 北京 100049
摘要
为实现光学系统计算机辅助装调工程化应用,达到根据失调量的计算值对光学元件进行空间位置误差校正的目的,提出了失调量的计算值和调整机构调整量之间的过渡方法,利用坐标变换和最小二乘优化算法建立了失调量调整量的关系模型,完成了两者坐标基准过渡。仿真结果表明,根据此方法自编程序计算出的平移调整量精度可达10-6 mm量级,角度调整量精度可达0.02″量级,计算精度远高于光学系统的装调要求。在模拟装调过程中,与直接采用失调量计算值对元件调整的结果相比,此方法的调整结果明显好于前者。对于不同的光学元件装卡方式和调整机构,可对此算法的相关参量进行赋值,灵活运用于不同的工况,为计算机辅助装调的实际工程化应用提供理论依据。
Abstract
In order to realize the engineering application of optical system computer-aided alignment and reach the goal of spatial location error correction for optical elements according to the misalignment by calculation, a method of transition between the misalignment by calculation and alignment quantity of adjusting mechanism is presented. Coordinate transform and least squares optimization algorithm are used to establish the misalignment-alignment quantity relation model. The coordinate datum transform between them are finished. Simulation results show that the accuracy of translational alignment quantity can reach 10-6 millimeter order and the accuracy of angular alignment quantity can reach 0.02″ order, which are calculated by self-compiled program according to the method. The accuracy of calculation is much higher than the accuracy needed for optical system computer-aided alignment. In the simulation of alignment, compared with the result of alignment on the basis of misalignment by calculation, the result of the method is much better. For different chucking methods of optical elements and adjusting mechanisms, related parameters of the method can be assigned to meet the requirements of different working conditions. The method provides the reference basis for engineering application of optical system computer-aided alignment.

顾志远, 颜昌翔, 胡春晖, 王洋, 高志良, 刘伟. 光学系统计算机辅助装调的坐标基准过渡方法[J]. 光学学报, 2014, 34(3): 0322003. Gu Zhiyuan, Yan Changxiang, Hu Chunhui, Wang Yang, Gao Zhiliang, Liu Wei. Coordinate Datum Transition Method for Optical System Computer-Aided Alignment[J]. Acta Optica Sinica, 2014, 34(3): 0322003.

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