碲锌镉晶体中存在着各种晶体缺陷, 其中小角晶界是制约碲锌镉晶体质量的主要晶体缺陷之一。X射线衍射形貌术是一种非破坏性地全面研究小角晶界缺陷的有效方法。采用反射式 X射线衍射形貌术对碲锌镉衬底的小角晶界缺陷进行了研究, 讨论了小角晶界类型、样品扫描方向以及入射线发散度等对小角晶界缺陷的 X射线衍射形貌的影响。为全面获得小角晶界缺陷的衍射形貌, 应尽量选择宽的入射线狭缝, 对于对称倾侧晶界和扭转晶界, 应分别平行和垂直于小角晶界方向扫描。

In the Cadmium Zinc Telluride (CdZnTe) single crystals, many kinds of typical crystal defects could be observed, among which low-angle grain boundary is the major one. X-ray diffraction topography is a powerful method for the investigation of low-angle grain boundary defect without destruction to the sample. In this paper, low-angle grain boundary defects of CdZnTe substrate were investigated by X-ray diffraction topography in reflection. The effect of the types of low-angle grain boundary, scanning direction and the divergence of incident beam on the X-ray diffraction topography was studied. The results show that the large slit should be applied for taking the whole topography of low-angle grain boundary defects. For taking the best topography, scanning direction parallel to the low-angle grain boundary should be applied for symmetrical low-angle tilt grain boundary. And scanning direction vertical to the low-angle grain boundary should be applied for low-angle twist grain boundary.