为了改进傅里叶变换红外光谱仪的动镜驱动装置,设计了一种基于柔性铰链支撑的动镜扫描系统.采用柔性铰链的支撑方式和音圈电机的驱动方式,利用具有高精度高稳定性的直角型柔性铰链支撑机构支撑动镜,利用音圈电机驱动动镜前后往复运动,采用DSP控制系统对动镜的匀速进行控制.实验结果表明所设计的动镜扫描系统具有方向稳定性、速度稳定性、抗震性能优越等优点.

In order to improve moving mirror drive of Fourier transform infrared spectrometer,we design a dynamic scanning system based on flexible hinge support.Using the flexible hinge support way and the voice coil motor drive mode.Specifically,Using right Angle with high accuracy high stability type flexible hinge support mechanism support moving mirror,dynamic mirror can be moved forward and backward driven by voice coil motor reciprocating motion,DSP control system to control the moving mirror at a constant speed.The experimental results show that the designed of moving mirror scanning system has advantages of stability direction,speed stability,superior seismic performance.