Photonics Research, 2015, 3 (5): 05000279, Published Online: Jan. 6, 2016
High-Q silica microdisk optical resonators with large wedge angles on a silicon chip Download: 608次
Abstract
We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°, 70°, and 79° with optical quality factors of 2.4 × 107, 8.1 × 106, 5.9 × 106, and 7.4 × 106, respectively, from ~80 μmdiameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 106 with a wedge angle of 74°.
Guanyu Li, Pei Liu, Xiaoshun Jiang, Chao Yang, Jiyang Ma, Hongya Wu, Min Xiao. High-Q silica microdisk optical resonators with large wedge angles on a silicon chip[J]. Photonics Research, 2015, 3(5): 05000279.